Abstract
This paper presents a new biaxial silicon resonant micro-accelerometer. The device basically consists of a single proof mass, four pairs of decoupled beams, four lever mechanisms and two pairs of resonators, which provides 2-D in-plane acceleration measurement with the decoupled two pairs of resonators. Structure optimization is implemented by taking advantage of the finite element analyses. From the simulation results we can see that the effective frequencies of two acceleration sensitive modes are 1010.18 and 1010.13 Hz respectively, and the undesired modes and effective modes are isolated apparently. Additionally, high linear relationship between the input acceleration and the resonant frequency shifts of resonators are demonstrated by the input–output characteristic simulation. Moreover, simulation results reveal the scale factor for the x-axis is 180.03 Hz/g, and the scale factor for y-axis is 180.75 Hz/g, while the cross-axis sensitivity for x-axis is 0.046 Hz/g, and the cross-axis sensitivity for y-axis is 0.027 Hz/g. The high sensitivity and low cross-axis sensitivity are thus adequately confirmed. By the way, the simulation of temperature dependent characteristics demonstrate that the differential scheme can effectively suppress the influence of temperature variation, and the thermal analysis shows that the device can bear the thermal stress induced by temperature change. All these simulations above can verify the feasibility of the structure design.
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References
Caspani A, Comi C, Corigliano A (2013) Compact biaxial micromachined resonant accelerometer. J Micromech Microeng 23(10):105012
Chang SC, Putty MW, Hicks DB, Li CH, Howe RT (1990) Resonant-bridge two-axis microaccelerometer. J Sens Actuators A21-A23:342–345
Comi C, Corigliano A, Langfelder G (2010) A resonant microaccelerometer with high sensitivity operating in an oscillating circuit. J Microelectromech Syst 19(5):1140–1152
Comi C, Corigliano1 A, Langfelder G (2011) A new biaxial silicon resonant micro accelerometer. MEMS, Cancun, Mexico, pp 529–532
Huang L, Yang H, Gao Y (2013) Design and implementation of a micromechanical silicon resonant accelerometer. J Sens 13(11):15785–15804
Hwang DH, Lo YC, Chin K (2001) Design considerations of the biaxial frequency-shifted microaccelerometer. J Proc SPIE 4593:62–71
Hwang DH, Chin KP, Lo YC (2005) Structure design of a 2-D high-aspect-ratio resonant microbeam accelerometer. J Microlithogr Microfab Microsyst 4:033009-1–033009-7
Kurowski P M (2004) Finite element analysis for design engineers. M. SAE Technical Paper
Shang YL, Wang JB, Chen DY (2012) Closed-loop control of a SOI-MEMS resonant accelerometer with electromagnetic excitation. J Key Eng Mater 503:211–215
Su SXP, Yang HS, Agogino AM (2005) A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology. J IEEE Sens J 5:1214–1223
Suminto JT (1996) A wide frequency range, rugged silicon micro accelerometer with overrange stops. MEMS, Sunnyvale, pp 180–185
Tabata O, Yamamoto T (1999) Two-axis detection resonant accelerometer based on rigidity change. J Sens Actuators 75:53–59
Yang B, Zhao H, Dai B (2013) The design of a new biaxial decoupled resonant micro-accelerometer. J Adv Mater Res 744:466–469
Acknowledgments
This work is supported by National Natural Science Foundation of China (Contract Numbers: 61104217 and U1230114), the Eleventh Peak Talents Programme Foundation in the Six New Industry Areas and the China Academy of Space Technology (CAST) Innovation Foundation.
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Zhao, L., Dai, B., Yang, B. et al. Design and simulations of a new biaxial silicon resonant micro-accelerometer. Microsyst Technol 22, 2829–2834 (2016). https://doi.org/10.1007/s00542-015-2636-y
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DOI: https://doi.org/10.1007/s00542-015-2636-y