Skip to main content
Log in

Fabrication of flexible light guide plate using CO2 laser LIGA-like technology

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

The liquid crystal display (LCD) needs the back light module (BLM) for the light source. The light guide plate (LGP) is the main component of BLM to spread light source to the whole LCD surface and requires for the generation trend of lightweight, easy to carry, and bendable for LCD. In this article, we have demonstrated the fabrication of flexible LGP using CO2 laser LIGA-like technology which includes the laser ablation of micro-groove polymethylmethacrylate (PMMA) master mold, pouring polydimethylsiloxane (PDMS) to the mold and casting the micro-groove microstructure for flexible LGP application. Different laser powers and micro-groove pitches were used to ablate the PMMA mold with varied groove depths and taper angles. Optical microscope was used to examine the morphology and profile of the final bendable LGP microstructure. Under the varied laser power of 1–12 W, the mean taper angles of PMMA micro-grooves ranged from 28° to 70° and the etching depths were from 44.5 to 281.8 μm. The flexible PDMS LGP had good microstructure duplication after casting. The optical uniformity and luminance of flexible LGP was concerned with structure of micro-grooves and measured using BM9 luminance meter. The maximal light uniformity and average luminance of LGP at some microstructure reaches 75 % and 119 cd/m2, respectively.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

References

  • Chiang MH, Chen CC, Kuo CFJ (2009) The high response and high efficiency velocity control of a hydraulic injection molding machine using a variable rotational speed electro-hydraulic pump-controlled system. Int J Adv Manuf Technol 43:841–851

    Article  Google Scholar 

  • Chien HC, Chen ZP (2009) The study of integrated LED-backlight plate fabricated by micromachining technique. Microsyst Technol 15:383–389

    Article  Google Scholar 

  • Chung CK, Hong YZ (2007) Fabrication and analysis the reflowed microlens arrays using JSR THB-130 N photoresist. Microsyst Technol 13:523–530

    Article  Google Scholar 

  • Chung CK, Lin SL (2011) On the fabrication of minimizing bulges and reducing the feature dimensions of microchannels using novel CO2 laser micromachining. J Micromech Microeng 21:065023

    Article  Google Scholar 

  • Chung CK, Wu MY (2007) A hybrid CO2 laser processing for silicon etching. Opt Express 15:7269–7274

    Article  Google Scholar 

  • Chung CK, Lin YC, Huang GR (2005) Bulge formation and improvement of the polymer in CO2 laser micromachining. J Micromech Microeng 15:1878–1884

    Article  Google Scholar 

  • Chung CK, Chang HC, Shih TR, Lin SL, Hsiao EJ, Chen YS, Chang EC, Chen CC, Lin CC (2010a) Water-assisted CO2 laser ablated glass and modified thermal bonding for capillary-driven bio-fluidic application. Biomed Microdevices 12:107–114

    Article  Google Scholar 

  • Chung CK, Sher KL, Syu YJ, Cheng CC (2010b) Fabrication of cone-like microstructure using UV LIGA-like for light guide plate application. Microsyst Technol 16:1619–1624

    Article  Google Scholar 

  • Hong TF, Ju WJ, Wu MC, Tai CH, Tsai CH, Fu LM (2010) Rapid prototyping of PMMA microfluidic chips utilizing a CO2 laser. Microfluid Nanofluid 9:1125–1133

    Article  Google Scholar 

  • Huang YJ, Chang TL, Chou HP, Lin CH (2008) A novel fabrication method for forming inclined groove-based microstructures using optical elements. Jpn J Appl Phys 46:5287–5290

    Article  Google Scholar 

  • Klank H, Kutter JP, Geschke O (2002) CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic system. Lab Chip 2:242–246

    Article  Google Scholar 

  • Lee JH, Park SR, Yang SH, Kim YS (2004) Fabrication of a V-groove on the optical fiber connector using a miniaturized machine tool. J Mater Process Technol 155–156:1716–1722

    Article  Google Scholar 

  • Lee JH, Choi WS, Lee KH, Yoon JB (2008) A simple and effective fabrication method for various 3D microstructures: backside 3D diffuser lithography. J Micromech Microeng 18:125015 (p 7)

    Article  Google Scholar 

  • Lin TH, Isayev AI, Mehranpour M (2008) Luminance of injection-molded V-groove light guide plates. Polym Eng Sci 48:1615–1623

    Article  Google Scholar 

  • Nayak NC, Lam YC, Yue CY, Shinha AT (2008) CO2-laser micromachining of PMMA: the effect of polymer molecular weight. J Micromech Microeng 18:095020

    Article  Google Scholar 

  • Nielsen CS, Balling P (2006) Deep drilling of metals with ultrashort laser pulses: a two-stage process. J Appl Phys 99:093101

    Article  Google Scholar 

  • Park SR, Kwon OJ, Shin D, Song SH (2007) Grating micro-dot patterned light guide plates for LED backlights. Opt Express 15:2888–2899

    Article  Google Scholar 

  • Tan B, Venkatakrishnan K (2007) Nd-YAG laser microvia drilling for interconnection application. J Micromech Microeng 17:1511–1517

    Article  Google Scholar 

  • Xie J, Zhuo YW, Tan TW (2011) Experimental study on fabrication and evaluation of micro pyramid-structured silicon surface using a V-tip of diamond grinding wheel. Precision Eng 35:173–182

    Article  Google Scholar 

  • Yost FG, Rye RR, Mann JA Jr (1997) Solder wetting kinetics in narrow V-groove. Acta Mater 45:5337–5345

    Article  Google Scholar 

Download references

Acknowledgments

This work is partial sponsored by National Science Council (NSC) under contract No. NSC 95-2221-E006-047-MY3 and 98-2221-E-006-052-MY3. Great thanks are paid to the Center for Micro/Nano Science and Technology (CMNST) at National Cheng Kung University, National Nano Device Laboratories (NDL) and National Center for High-performing Computing (NCHC) for the access of process, computation and analysis equipments.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to C. K. Chung.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Chung, C.K., Syu, Y.J., Wang, H.Y. et al. Fabrication of flexible light guide plate using CO2 laser LIGA-like technology. Microsyst Technol 19, 439–443 (2013). https://doi.org/10.1007/s00542-012-1665-z

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-012-1665-z

Keywords

Navigation