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The online version of the original article can be found under doi:10.1007/s00339-008-4863-x.
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Chung, C.K., Sung, Y.C., Huang, G.R. et al. Erratum to Crackless linear through-wafer etching of Pyrex glass using liquid-assisted CO2 laser processing. Appl. Phys. A 94, 213 (2009). https://doi.org/10.1007/s00339-008-4949-5
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DOI: https://doi.org/10.1007/s00339-008-4949-5