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Synthesis of vertically aligned carbon nanofibers using inductively coupled plasma-enhanced chemical vapor deposition

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Abstract

This journal paper reports a highly reliable and efficient method for the growth of vertically aligned carbon nanofibers. The inductively coupled plasma-enhanced chemical vapor deposition method utilizes a low substrate temperature (approx. 650 \({^{\circ }}\)C) for the growth purpose using toluene as carbon source. Carbon nanofibers are characterized using SEM (scanning electron microscopy), EDX (energy-dispersive X-ray) and Raman spectroscopy. Uniform carbon nanofibers are grown on different substrates. The results further show that the use of catalyst is not mandatory to grow the carbon nanofibers.

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Authors and Affiliations

  1. Department of Microsystems Engineering – IMTEK, University of Freiburg, 79110, Freiburg, Germany

    Rizwan Shoukat

  2. Department of Electronics Engineering, University of Engineering and Technology (UET), Taxila, 47050, Pakistan

    Muhammad Imran Khan

  3. Micro/-Nano Electronic System Integration R&D Center (MESIC), University of Science and Technology of China (USTC), Hefei, 230027, Anhui, China

    Muhammad Imran Khan

Authors
  1. Rizwan Shoukat
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  2. Muhammad Imran Khan
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Correspondence to Rizwan Shoukat.

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Shoukat, R., Khan, M.I. Synthesis of vertically aligned carbon nanofibers using inductively coupled plasma-enhanced chemical vapor deposition. Electr Eng 100, 997–1002 (2018). https://doi.org/10.1007/s00202-017-0561-z

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  • DOI: https://doi.org/10.1007/s00202-017-0561-z

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