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Coupling stress caused by thermal and slicing force in KDP crystal slicing with fixed abrasive wire saw

  • Zongqiang Li
  • Peiqi Ge
  • Wenbo Bi
  • Tengyun Liu
  • Peizhi Wang
  • Yufei Gao
ORIGINAL ARTICLE

Abstract

KDP (KH2PO4) crystal is an important functional crystalline material that can be used in the area of laser frequency conversion. As the first process of machining, the slicing process of the KDP crystal is of vital importance to the yield rate of wafers. While the KDP crystal often cracks in the slicing process by the traditional method of band saw because of its properties of high brittleness, low strength, and high thermal sensitivity, the cracks may lead to waste of the whole KDP crystal and should be avoided. Fixed abrasive wire saw slicing is considered a preferred method for KDP crystal slicing due to its advantage of low sling stress. In this paper, a finite element model in fixed abrasive wire saw slicing of the KDP crystal is established with respect to distributed slicing force and thermal stress. Distribution of slicing force and heat around the kerf area is deduced and applied to the finite element model. Based on the model, temperature field and stress field of the KDP crystal in the slicing process is obtained. The maximum principle stress caused by slicing force, thermal stress, and coupling of the slicing force and thermal stress is obtained. The maximum principle stress of different slicing parameters is analyzed; function equation between the maximum principle stress and slicing parameter is obtained by the least squares method. The critical slicing parameter at which cracks would not occur in the slicing is obtained. The simulation results in this paper are useful to avoid cracking in KDP crystal slicing with fixed abrasive wire saw.

Keywords

KDP crystal Fixed abrasive wire saw Temperature field Coupling stress of slicing force and thermal stress 

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Notes

Acknowledgements

This work is supported by the National Natural Science Foundation of China (51775317) and the Key Research and Development Program of Shandong Province (2017GGX30142).

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Copyright information

© Springer-Verlag London Ltd., part of Springer Nature 2018

Authors and Affiliations

  • Zongqiang Li
    • 1
  • Peiqi Ge
    • 1
    • 2
  • Wenbo Bi
    • 1
  • Tengyun Liu
    • 1
  • Peizhi Wang
    • 1
  • Yufei Gao
    • 1
  1. 1.School of Mechanical EngineeringShandong UniversityJinanChina
  2. 2.Key Laboratory of High-Efficiency and Clean Mechanical Manufacture at Shandong UniversityMinistry of EducationJinanChina

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