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Neuartige TiAlN-Beschichtung mit spezieller Nanostruktur, abgeschieden mittels HR MT-CVD

Novel TiAlN Coating with Special Nanostructure, deposited by HR MT-CVD

  • 01.04.2016|Forschung & Technik|Ausgabe 2/2016
  • Published:
Keramische Zeitschrift

Kurzfassung

In diesem Beitrag wird eine Titanaluminiumnitrid-Hartstoffschicht vorgestellt, die mittels thermischem CVD-Verfahren unter Verwendung des hoch reaktiven Stickstoff-Precursors Ammoniak abgeschieden wurde. Die Besonderheit dieser Hartstoffschicht besteht in ihrem speziellen nanolamellaren Aufbau. Des Weiteren wird gezeigt, dass durch Modifikation der Abscheidungsparameter gezielt Einfluss auf den Lagenabstand genommen werden kann, wodurch sich wichtige Eigenschaften der Schicht, wie zum Beispiel ihre Härte, entscheidend beeinflussen lassen. An Hand von Beispielen wird das Potenzial dieser Hartstoffbeschichtung im Bereich der Metallzerspanung aufgezeigt.

Abstract

In this article a titanium aluminium nitrid coating, deposited by thermal CVD using the highly reactive nitrogen precursor ammonia, is introduced. The special feature of this hard coating is its nano lamellar structure. Furthermore the possibility to selectively control the layer distance by modifying the deposition parameters is discussed. Important coating properties, for instance the hardness, can be significantly influenced. Examples of different metal cutting applications are presented to demonstrate the potential of this hard coating.

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Authors and Affiliations

  1. Boehlerit GmbH & Co. KG, Werk VI-Str. 100, A-8605, Kapfenberg, Austria

    R. Pitonak, A. Köpf, R. Weißenbacher, J. Keckes & J. Tod

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  1. R. Pitonak
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  2. A. Köpf
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  3. R. Weißenbacher
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  4. J. Keckes
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  5. J. Tod
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Correspondence to R. Pitonak.

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Pitonak, R., Köpf, A., Weißenbacher, R. et al. Neuartige TiAlN-Beschichtung mit spezieller Nanostruktur, abgeschieden mittels HR MT-CVD. Keram. Z. 68, 111–116 (2016). https://doi.org/10.1007/BF03400247

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  • DOI: https://doi.org/10.1007/BF03400247

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