Ion Figuring of Light-Weighted Aspherical Mirrors
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High accuracy surface figuring of light-weighted aspherical optical mirrors using conventional polishingtechniques becomes increasingly difficult with size as problems such as tool footprint, edge turndown become severe. Hence, a non-contact polishing process called “ion figuring” was evolved where in material removal is done by energetic ion bombardment. In this paper the development of an ion figuring system based on ion beam sputtering process shall be described and demonstrated with a few examples.
KeywordsIon figuring light-weighted mirror non-contact polishing aspheric surface
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