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JOM

, Volume 41, Issue 4, pp 8–8 | Cite as

Process control for heterogeneous materials systems: A universal challenge

  • L. C. Kimerling
Semiconductor Processing Commentary
  • 15 Downloads

Keywords

Compound Semiconductor Gallium Arsenide Lattice Misfit Indium Phosphide Silica Optical Fiber 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© TMS 1989

Authors and Affiliations

  • L. C. Kimerling
    • 1
  1. 1.AT&T Bell LaboratoriesUSA

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