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Blue emission from hydrogen-containing a-Si:H/SiO2 multilayers and the investigation of its mechanism

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Chinese Science Bulletin

Abstract

A series of hydrogen-containing a-Si:H/SiO2 multilayers with different a-Si:H sublayer thickness were fabricated by layer-by-layer deposition andin situ plasma oxidation in a plasma-enhanced chemical vapor deposition system (PECVD). Optical induced blue emission from the samples was observed by the naked eye at room temperature, which has never been reported in the luminescence study of Si/SiO2 multilayers up to now. Both the photoluminescence (PL) peak and the absorption edge show a blue shift as the a-Si:H sublayer thickness decreases. The origin of the blue emission and the effect of hydrogen are discussed.

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Authors and Affiliations

  1. State Key Laboratory of Solid Microstructure and Department of Physics, Nanjing University, 210093, Nanjing, China

    Da Zhu, Zhongyuan Ma, Jiaxin Mei, Peigao Han, Xinfan Huang & Kenji Chen

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  1. Da Zhu
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  2. Zhongyuan Ma
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  3. Jiaxin Mei
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  4. Peigao Han
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  5. Xinfan Huang
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  6. Kenji Chen
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Correspondence to Da Zhu.

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Zhu, D., Ma, Z., Mei, J. et al. Blue emission from hydrogen-containing a-Si:H/SiO2 multilayers and the investigation of its mechanism. Chin. Sci. Bull. 49, 1906–1910 (2004). https://doi.org/10.1007/BF03184279

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  • DOI: https://doi.org/10.1007/BF03184279

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