Study of the effect of imperfect tips on nanoindentation by FEM

  • Feng -Yuan Chen
  • Rwei -Ching Chang


In this paper, the imperfect tip effect of the Ti film on Si substrate on nanoindentation with Berkovich probe tip was investigated with the finite element method (FEM). In the literature, we found the effects of tip deformation and tip radius on nanoindentation were investigated frequently, but the imperfect centerline of tip has never been studied. In this work, at first, the Ti film on Si substrate was conducted with a high-resolution nanomechanical test. The Young’s modulus of Ti films can be obtained by using the Oliver and Pharr method while the nanoindentation depth is smaller than 20% of the film thickness for avoiding the substrate effect. Second, the FEM was employed to determine the yield stress of thin films because it cannot be found from nanoindentation. Finally, the load-depth of nanoindentation was compared between the experimental data and numerical results. The results show while choosing the suitable yield stress of films, the load-depth curves of numerical simulation were very close to the experimental curves with the imperfect effect being ignored. Moreover, it is concluded while the imperfect angles of tip were considered that the larger imperfect angles |θ x | orθ x , the smaller displacement on nanoindentation.


Nanoindentation FEM ħin film Imperfect tips 


  1. [1]
    M. Lichinchi, C. Lenardi, J. Haupt and R. Vitali, Simulation of Berkovich nanoindentation experiments on thin films using finite element method,Thin Solid Films. 312 (1998) 240–248.CrossRefGoogle Scholar
  2. [2]
    D. Ma, K. Xu and J. He, Numerical simulation for determining the mechanical properties of thin metal films using depth-sensing indentation technique,Thin Solid Films. 323 (1998) 183–187.CrossRefGoogle Scholar
  3. [3]
    M. Bai, K. Kato, N. Umehara and Y. Miyake, Nanoindentation and FEM study of the effect of internal stress on micro/nano mechanical property of thin CNx films,Thin Solid Films. 377–378 (2000) 138–147.CrossRefGoogle Scholar
  4. [4]
    H. Pelletier, J. Kxier, A. Cornet and P. Mille, Limits of using bilinear stress-strain curve for finite element modeling of nanoindentation response on bulk materials,Thin Solid Films. 379 (2000) 147–155.CrossRefGoogle Scholar
  5. [5]
    K. D. Bouzakis, N. Michailidis and G Erkens, Thin hard coatings stress-strain curve determination through a FEM supported evaluation of nanoindentation test results,Surface and Coatings Technology. 142–144 (2001) 102–109.CrossRefGoogle Scholar
  6. [6]
    K. D. Bouzakis and N. Michailidis, Coating elastic-plastic properties determined by mean of nanoindentation and FEM-supported evaluation algorithm,Thin Solid Films. 469–470 (2004) 227–232.CrossRefGoogle Scholar
  7. [7]
    K. D. Bouzakis, N. Michailidis and G. Skordaris, Hardness determined by mean of a FEM-supported simulation of nanoindentation and applications in thin hard coating,Surface and Coatings Technology. 200 (2005) 867–871.CrossRefGoogle Scholar
  8. [8]
    S. M. Jeong and H. L. Lee, Finite element analysis of the tip deformation effect on nanoindentation hardness,Thin Solid Films. 492 (2005) 173–179.CrossRefGoogle Scholar
  9. [9]
    J. Y. Kim, B. W. Lee, D. T. Read and D. Kwon, Influence of tip bluntness on the size-dependent nanoindentation hardness,Scripta Materialia. 52 (2005) 353–358.CrossRefGoogle Scholar
  10. [10]
    A. W. Warren and Y. B. Guo, Machined surface properties determined by nanoindentation: experimental and FEA studies on the effects of surface integrity and tip geometry,Surface and Coatings Technology. 201 (2006) 423–433.CrossRefGoogle Scholar
  11. [11]
    W. C. Oliver and GM. Pharr, An improved technique for determining hardness and elastic-modulus using load and displacement sensing indentation experiments,J. Mater. Res. 7 (1992) 1564–83CrossRefGoogle Scholar

Copyright information

© The Korean Society of Mechanical Engineers (KSME) 2007

Authors and Affiliations

  1. 1.Department of Mechanical EngineeringLee-Ming Institute of TechnologyTaiwan
  2. 2.Department of Mechanical and Computer-Aided EngineeringSt. John’s UniversityTaiwan

Personalised recommendations