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Czechoslovak Journal of Physics

, Volume 50, Supplement 3, pp 427–432 | Cite as

A study of the DC discharge in a cylindrical magnetron comparison of experiment and a pic model

  • J. F. Behnke
  • C. Csambal
  • P. Kudrna
  • J. Rusz
  • M. Tichý
Plasma Technology

Abstract

We studied the DC discharge in a cylindrical magnetron experimentally and via numerical simulation. Presented experimental results have been obtained by probe measurements. Numerical results have been obtained using a one-dimensional PIC-MCC (XPDC1) code available at http://langmuir.eecs.berkeley.edu. We present a comparison of the experimentally obtained radial profiles of the floating and plasma potentials, the radial electric field, plasma density, the electron mean energy and the electron energy distribution function in the discharge plasma with the results obtained from the numerical model. While for most plasma parameters studied, a reasonable agreement is obtained, the calculated electric field is higher than that observed experimentally. This discrepancy is suggested to be due to the end effects of the discharge vessel.

Keywords

Plasma Density Discharge Plasma Electron Energy Distribution Function Plasma Potential Radial Electric Field 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer 2000

Authors and Affiliations

  • J. F. Behnke
    • 1
  • C. Csambal
    • 1
  • P. Kudrna
    • 1
  • J. Rusz
    • 2
  • M. Tichý
    • 2
  1. 1.Institute for PhysicsUniversity of GreifswaldGreifswaldGermany
  2. 2.Faculty of Mathematics and Physics Department of Electronics and Vacuum PhysicsCharles University in PraguePraha 8Czech Republic

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