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Finite element analysis of process control and operating limits in edge-defined film-fed growth (EFG) of silicon and sapphire ribbons: A review

  • Condensed Matter
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Acta Physica Hungarica

Abstract

Numerical solutions are described of the coupled heat transfer and capillary equations representing growth of silicon and Al2O3 ribbons by the EFG technique. The solutions allow study on a quantitative level of the relationship between process control parameters on the one hand, and operating limits and interface shapes on the other. Silicon and Al2O3 ribbon growth are contrasted and the role of thermophysical properties of these materials in setting operation regimes for achieving growth in practice is examined.

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Kalejs, J.P., Ettouney, H.M. & Brown, R.A. Finite element analysis of process control and operating limits in edge-defined film-fed growth (EFG) of silicon and sapphire ribbons: A review. Acta Physica Hungarica 57, 189–203 (1985). https://doi.org/10.1007/BF03158889

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