Advertisement

Penning-type sputtering sources

  • G. Kertész
  • Gy. Vágó
Physics of Condensed Matter Thin Films
  • 11 Downloads

Keywords

Magnetic Field Industrial Research Favourable Feature Vacuum Technology Sputtering Source 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© with the authors 1980

Authors and Affiliations

  • G. Kertész
    • 1
  • Gy. Vágó
    • 1
  1. 1.Industrial Research Institute for ElectronicsBudapestHugnary

Personalised recommendations