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Energy dispersive X-ray microanalysis of phosphosilicate glasses (PSG)

  • Physics of Condensed Matter
  • Short Contributions and Posters Surface Physics
  • Published:
Acta Physica Academiae Scientiarum Hungaricae

Abstract

EDS peak height ratio method has been used for chemical microanalysis of PSG samples in a scanning electron microscope. We have applied a no-standard inverse ZAF-type correction procedure to calculate working curves as a function of beam energy and take-off angle. With the obtained correction procedure the EDS measurement is fast, precise and accurate compared with other physical techniques. Using this method a proportional relationship has been verified between the PH3/SiH4 ratio of the CVD process and the P concentration of the deposited PSG layer.

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References

  1. G. L. Schnable, W. Kern andR. B. Comizzoli, J. Electrochem. Soc.,122, 1092, 1975.

    Article  Google Scholar 

  2. Nagasima et al, JES,121, 434, 1974.

    Google Scholar 

  3. M. Armstrong andA. Tolliver, JES,121, 307, 1974.

    Google Scholar 

  4. W. Kern et al, RCA Review,37, 3, 1976.

    ADS  Google Scholar 

  5. I. C. Irwin, Bell Syst. Techn. J.,41, 387, 1962.

    Google Scholar 

  6. G. Giacomo, JES,121, 419, 1974.

    Google Scholar 

  7. S. E. Ormrod andB. P. Richards, Microelectronics,8, 5, 1977.

    Google Scholar 

  8. E. Tannenbaum, Solid State Electron.,2, 123, 1961.

    Article  ADS  Google Scholar 

  9. R. N. Ghostagore, Solid State Electron.,17, 1065, 1974.

    Article  ADS  Google Scholar 

  10. E. Kool, J. Electrochem. Soc.,111, 1383, 1964.

    Article  Google Scholar 

  11. E. H. Snow andB. E. Deal, J. Electrochem. Soc.,113, 263, 1966.

    Article  Google Scholar 

  12. A. S. Tenney andM. Ghezzo, J. Electrochem. Soc.,120, 1276, 1973.

    Article  Google Scholar 

  13. A. Czirbesz andJ. Timár, HIKI Jubileumi Évkönyv 1978. (Anniversary Yearbook of Res. Inst. for Telecommunication) 23.

  14. E. Kótai, to be published.

  15. Pat. DuRant, NCR Microel. Div., Colorado Springs, Colorado, 1975.

    Google Scholar 

  16. H. Yakowitz, in “Practical Scanning Electron Microscopy” (ed. J. I. Goldstein) p. 327., Plenum N. Y., 1975.

    Google Scholar 

  17. J. L. Labar, to be published.

  18. J. W. Colby, Adv. in X-ray Anal.,11, 287, 1968.

    Google Scholar 

  19. K. F. J. Heinrich et al., NBS Techn. Note 719, 1972.

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Tóth, A.L., Puskás, J.É. Energy dispersive X-ray microanalysis of phosphosilicate glasses (PSG). Acta Physica 49, 133–140 (1980). https://doi.org/10.1007/BF03158727

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  • DOI: https://doi.org/10.1007/BF03158727

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