Abstract
EDS peak height ratio method has been used for chemical microanalysis of PSG samples in a scanning electron microscope. We have applied a no-standard inverse ZAF-type correction procedure to calculate working curves as a function of beam energy and take-off angle. With the obtained correction procedure the EDS measurement is fast, precise and accurate compared with other physical techniques. Using this method a proportional relationship has been verified between the PH3/SiH4 ratio of the CVD process and the P concentration of the deposited PSG layer.
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Tóth, A.L., Puskás, J.É. Energy dispersive X-ray microanalysis of phosphosilicate glasses (PSG). Acta Physica 49, 133–140 (1980). https://doi.org/10.1007/BF03158727
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DOI: https://doi.org/10.1007/BF03158727