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Acta Physica Hungarica

, Volume 70, Issue 3, pp 283–285 | Cite as

A new rotational vertical LPE System for GaAs−GaAlAs superlattice production

  • P. Masa
  • Z. Lábadi
  • E. Lendvay
Condensed Matter

Abstract

In this paper we present an enhanced Liquid Phase Epitaxial System applicable for III–V compound superlattice growth. The block diagram of the apparatus and the arrangement for optimal process control are presented.

Keywords

GaAs Control Valve Liquid Phase Epitaxy Instrument Communication Optimal Process Control 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    Carlos A. Smith, Armando B. Corripio, Principles and Practice of Automatic Process Control, Wiley, New York, 1985.Google Scholar
  2. 2.
    Eurotherm 822 Temperature Controller Maintenance Manual, Eurotherm Ltd.Google Scholar
  3. 3.
    Eurotherm 800 Series Instrument communications Manual, Eurotherm Ltd.Google Scholar

Copyright information

© Akadémiai Kiadó 1991

Authors and Affiliations

  • P. Masa
    • 1
  • Z. Lábadi
    • 1
  • E. Lendvay
    • 1
  1. 1.Research Institute for Technical PhysicsHungarian Academy of SciencesBudapestHungary

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