Abstract
The recent development from micro- to nanotechnology enables new ideas and new physical effects to be implemented in both conventional and novel devices. Examples of fast developing fields in this context are electronic, photonic and magnetic components for sensor, memory, and logic applications. Optical lithography, the traditional path of patterning, is supplemented with sophisticated methods to access the nanoworld.
Zusammenfassung
Die jüngste Entwicklung von der Mikro- zur Nanotechnologie bringt neue Ideen und neue physikalische Effekte hervor, welche sowohl in konventionellen als auch in neuartigen Bauteilen verwertet werden können. Beispiele sich schnell entwickelnder Felder sind in diesem Zusammenhang elektronische, photonische und magnetische Komponenten für Sensor-, Speicher- und Logikanwendungen. Die optische Lithographie als der traditionelle Weg zur Nanostrukturierung wird erweitert durch anspruchsvollere Methoden für den Zugang zur Nanowelt.
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Brückl, H., Hainberger, R., Heer, R. et al. Status and trends in modern micro- and nanotechnology. Elektrotech. Inftech. 122, 442–445 (2005). https://doi.org/10.1007/BF03054375
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DOI: https://doi.org/10.1007/BF03054375