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Il Nuovo Cimento D

, Volume 19, Issue 2–4, pp 439–445 | Cite as

Interface study of W/Si multilayers with increasing number of periods

  • M. Jergel
  • E. Majková
  • V. Holý
  • Š. Luby
  • R. Senderák
Article

Summary

The X-ray reflectivity and diffuse-scattering measurements at grazing incidence on W/Si multilayers with increasing number of periodsN from 3 to 15 were performed using the CuKα1 radiation. The Fresnel optical computational code and distorted-wave Born approximation were used to evaluate the results. The multilayer Bragg interferences are observed fromN=6. The reflectivity on the 1st Bragg maximum increases from 20% to 55% on increasingN from 6 to 15. The r.m.s. interface roughness of 0.65 nm does not change withN. A model of vertically correlated interface profiles was successfully used to simulate the diffuse scattering results and confirmed a negligible cumulative interface roughness upwards the multilayers. The lateral correlation length of 10 nm is independent ofN. An additional roughness component of very large correlation length (“waviness”) had to be included to obtain self-consistent simulations of the sample and detector scans forN≥9. A gradual increase of the fractal parameter of the interface profiles fromh=0.15 forN=3 toh=0.75 forN=15 is the most pronounced effect of increasingN and implies the loss of the fractal behaviour.

PACS

68.35.Bs Surface structure and topography 

PACS

68.65 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties 

PACS

78.66.Bz Metals and metallic alloys 

PACS

78.70.Ck X-ray scattering 

PACS

01.30.Cc Conference proceedings 

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Copyright information

© Società Italiana di Fisica 1997

Authors and Affiliations

  • M. Jergel
    • 1
  • E. Majková
    • 1
  • V. Holý
    • 2
  • Š. Luby
    • 1
  • R. Senderák
    • 1
  1. 1.Institute of PhysicsSlovak Academy of SciencesBratislavaSlovakia
  2. 2.Department of Solid State Physics, Faculty of ScienceMasaryk UniversityBrnoCzech Republic

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