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Kinetic properties of dislocations in semiconductors revealed by X-ray topography

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Il Nuovo Cimento D

Summary

In situ X-ray topography (in situ X-TOP) gives the most reliable and quantitative information on kinetic processes of dislocations in semiconductors among all experimental techniques available now. This paper gives a review on generation, motion and impurity pinning of dislocations in silicon which were investigated by means ofin situ X-TOP. It is emphasized how effectivelyin situ X-TOP has been applied to clarify impurity-related dislocation processes.

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References

  1. Sumino K. andHarada H.,Philos. Mag. A,44 (1981) 1319.

    Article  ADS  Google Scholar 

  2. Clarke D. R., Kroll M. C., Kirchner P. D., Cook R. F. andHockey B. J.,Phys. Rev. Lett.,60 (1988) 2156.

    Article  ADS  Google Scholar 

  3. Minowa K. andSumino K.,Phys. Rev. Lett.,69 (1992) 320.

    Article  ADS  Google Scholar 

  4. Imai M. andSumino K.,Philos. Mag. A,47 (1983) 599.

    Article  ADS  Google Scholar 

  5. Sumino K. andImai M.,Philos. Mag. A,47 (1983) 753.

    Article  ADS  Google Scholar 

  6. Sato M. andSumino K. inDislocations in Solids, edited byH. Suzuki, T. Ninomiya, K. Sumino andS. Takeuchi (Univ. of Tokyo Press, Tokyo) 1985, p. 391.

    Google Scholar 

  7. Sumino K. inPoint and Extended Defects in Semiconductors, edited byG. Benedek, A. Cavallini andW. Schröter (Plenum, New York/London) 1989, p. 77.

    Google Scholar 

  8. Yonenaga I. andSumino K.,J. Appl. Phys.,80 (1996) 734.

    Article  ADS  Google Scholar 

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Author notes

  1. K. Sumino (Professor Emeritus)

    Present address: Tohoku University, 980, Sendai, Japan

Authors and Affiliations

  1. Nippon Steel Corporation, 20-1 Shintomi, 293, Futtsu City, Chiba Prefecture, Japan

    K. Sumino (Professor Emeritus)

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  1. K. Sumino
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Sumino, K. Kinetic properties of dislocations in semiconductors revealed by X-ray topography. Nouv Cim D 19, 137–146 (1997). https://doi.org/10.1007/BF03040966

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  • DOI: https://doi.org/10.1007/BF03040966

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