Abstract
NiO films have been epitaxially grown by metal-organic chemical vapor deposition (MOCVD) on a bi-axially textured Ni substrate using Ni(thd)2 as a precursor. The NiO film was deposited at 470°C for 10 min at a deposition pressure of 10 Torr and oxygen partial pressure of 0.91 Torr. SEM and AFM observations for the deposited NiO film showed a smooth and dense morphology. X-ray rocking curve and φ-scan showed that the NiO film has a bi-axial texture with a (100)<001> orientation. The out-of-plane and the in-plane deviations were measured to be 4.2° and 6~7° from the FWHM of (200) and (111) planes, respectively.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Y. Iijima, N. Tanabe, O. Kohno and Y. Ikeno,Appl. Phys. Lett. 60, 769 (1992).
A. Goyal, D. P. Norton, J. Budai, M. Paranthaman, E. D. Specht, D. M. Kroeger, D. K. Christen, Q. He, B. Saffian, F. A. List, D. F. Lee, P. M. Martin, C. E. Klabunde, E. Hatfield and V. K. Sikka,Appl. Phys. Lett. 69, 1795 (1996).
A. Ginsbach, R. Schneider, H. W. Grueninger and G. Grabe,IEEE Trans. Mag. 27, 1410 (1991).
K. Matsumoto, S. B. Kim, I. Hirabayashi, T. Watanabe, N. Uno and M. Ikeda,Physica C 330, 150 (2000).
Y. Ito, M. Iwata, Y. Yoshida, Y Taksi and I. Hirabayashi,MRS Symp. Proc. 474, 125 (1997).
H. G. Lee, Y. M. Lee, C. H. Chung and G. W. Hong,Metals and Materials 6, 261 (2000).
H. G. Lee, Y. M. Lee, H. S. Shin, C. H. Chung, D. J. Youm and G. W. Hong,Supervonduct. Sci Teck 13, 1368 (2000).
K. Matsumoto, S. B. Kim, J. G. Wen, I. Hirabayashi, T. Watanabe, N. Uno and M. Ikeda,IEEE Trans, on Appl. Supervonduct. 9, 1539 (1999).
X. Cui, F. A. List, D. M. Kroeger, A. Goyal, D. F. Lee, J. E. Mathis, E. D. Spechi, P. M. Martin, R. Feenstra, D. T. Vere-belyi, D. K. Christen, and M. Paranthaman,IEEE Trans, on Appl. Supervonduct. 9, 1967 (1999).
Annual Report of Oak Ridge National Laboratory, ORNL/ HTSPC-10 (1999);ORNL/HTSPC-U (2000).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Lee, HG., Lee, YM., Shin, HS. et al. Epitaxial deposition of NiO film on a cube-textured Ni substrate by metal-organic chemical vapor deposition. Metals and Materials 6, 565–570 (2000). https://doi.org/10.1007/BF03028100
Issue Date:
DOI: https://doi.org/10.1007/BF03028100