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Annales des Télécommunications

, Volume 43, Issue 7–8, pp 443–459 | Cite as

Le diagnostic des circuits intégrés par faisceau d’électrons

  • Jean-Michel Fournier
  • Yves-Jacques Vernay
Article
  • 14 Downloads

Résumé

Cet article de synthèse montre comment la technique du test par faisceau d’électrons des circuits intégrés prototypes, en retour de première fabrication, est parvenue maintenant à une phase de maturité. Le principe physique de la mesure, d’une part, a fait Vobjet de nombreuses améliorations qui permettent d’obtenir plus rapidement des résultats à la fois plus fiables et plus précis (en potentiel et en temps). Par ailleurs ces performances accrues conduisent naturellement à développer des stations de diagnostic complètes, ergonomiques, dans lesquelles le microscope électronique à balayage se fait oublier de l’utilisateur, et qui deviennent le maillon terminal de la chaîne de conception assistée par ordinateur.

Mots clés

Circuit intégré Article synthèse Faisceau électronique Essai qualification Microscopie électronique balayage Potentiel surface Méthode mesure Spectromètre électron Modulation faisceau Installation mesure 

Integrated circuit debugging using electron beam

Abstract

The purpose of this synthetic article is to show how the electron beam testing technique of prototype integrated circuits after a first run has now reached maturity. Firstly the physics of measurement has been the subject of many improvements which means that results, both more reliable and more precise (in voltage and in time) can be obtained more quickly. Moreover this improved performance has led to the development of fully comprehensive diagnosis stations so ergonomic that the user forgets his scanning electron microscope, stations which become the final link in the chain of computer aided design.

Key words

Integrated circuit Review Electron beam Prototype test Scanning electron microscopy Surface potential Measurement method Electron spectrometry Beam modulation Measuring installation 

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Copyright information

© Institut Telecom / Springer-Verlag France 1988

Authors and Affiliations

  • Jean-Michel Fournier
    • 1
  • Yves-Jacques Vernay
    • 1
  1. 1.Département Cci-mccCentre National d’Etudes des TélécommunicationsMeylan CedexFrance

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