Implementation of a piezoresistive MEMS cantilever for nanoscale force measurement in micro/nano robotic applications
- 254 Downloads
The nanoscale sensing and manipulation have become a challenging issue in micro/nanorobotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/ nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in microrobotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a microrobotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.
Key WordsPiezoresistive MEMS Cantilever Atomic Force Microscope (AFM) Microrobotics Micro Force Sensing. Van der Waals Force Micro/Nano-manipulation
Unable to display preview. Download preview PDF.
- Burnham, N. and Kulik, A., 1999, “Surface Forces and Adhesion.” Handbook of Micro/Nanotribology, 2nd Edition. CRC Press, pp. 247–272.Google Scholar
- Dargahi, J., Parameswaran, M. and Payandeh, S., 2000, “A Micromachined Piezoelectric Tactile Sensor for an Endoscopie Grasper-Theory, Fabrication and Experiments,”Journal of Microelectromechanical Systems, Vol. 9, No. 3.Google Scholar
- Fearing, R., 1995, “Survey of Sticking Effects for Micro Parts Handling,” Proc. of 1995 IEEE/RSJ Int't. Conf. on Intelligent Robotics and Systems, Vol.2, pp. 212–217.Google Scholar
- Kim, D., Kim, K. and Hong, J., 2002, “Implementation of Self-Sensing MEMS Cantilevers for Nanomanipulation,” Proc. of the 4th Korean MEMS Conference, pp. 120–125.Google Scholar
- Park, J., Kim, D. Kim, T., Kim, B. and Lee, K., 2003, “Design and Performance Evaluation of a 3-DOF Mobile Microrobot for Micromani- pulation,”KSME international Journal, Vol. 17, No. 9, pp. 1268–1275.Google Scholar
- Requicha, A., 2001, “Layered Nanoassembly of Three-Dimensional Structures,” Proc. of 2001 IEEE Int’t Conf. on Robotics and Automation, pp. 3408–3411.Google Scholar
- Sitti, M., 2001, “Nanotribological Characterization System by AFM Based Controlled Pushing,” Proc. of IEEE-NANO 2001, pp. 99–104.Google Scholar
- Thompson, J. and Fearing, R., 2001, “Automating Microassembly with Ortho-Tweezers and Force Sensing,” Proc. of 2001 IEEE/RSJ Int'l. Conf. on Intelligent Robotics and Systems, pp. 1327–1334.Google Scholar
- Zhou, Y. and Nelson, 2000, “The Eeffect of Material Properties and Gripping Force on Micrograsping,” Proc. of 2000 IEEE Int’l Conf. on Robotics and Automation, pp. 1115–1120.Google Scholar