Skip to main content
SpringerLink
Log in

Implementation of a piezoresistive MEMS cantilever for nanoscale force measurement in micro/nano robotic applications

  • Published:
KSME International Journal Aims and scope Submit manuscript

Abstract

The nanoscale sensing and manipulation have become a challenging issue in micro/nanorobotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/ nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in microrobotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a microrobotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  • Arai, F., Lee, G. and Coltoti, R., 1998, “Integrated Microendeffector for Micromanipulation,”IEEE/ASME Transactions on Mechatronics, Vol. 3, No. 1, pp. 17–23.

    Article  Google Scholar 

  • Baselt, D., Lee, G. and Colton, R., 1996, “Biosensor Based on Force Microscope Technology,”Journal of Vacuum Science and Technology: B, Vol. 14, No. 2, pp. 789–793.

    Article  Google Scholar 

  • Burnham, N. and Kulik, A., 1999, “Surface Forces and Adhesion.” Handbook of Micro/Nanotribology, 2nd Edition. CRC Press, pp. 247–272.

  • Dargahi, J., Parameswaran, M. and Payandeh, S., 2000, “A Micromachined Piezoelectric Tactile Sensor for an Endoscopie Grasper-Theory, Fabrication and Experiments,”Journal of Microelectromechanical Systems, Vol. 9, No. 3.

  • Fearing, R., 1995, “Survey of Sticking Effects for Micro Parts Handling,” Proc. of 1995 IEEE/RSJ Int't. Conf. on Intelligent Robotics and Systems, Vol.2, pp. 212–217.

    Google Scholar 

  • Guthold, M., 1999, “Investigation and Modification of Molecular Structures with the Nanomanipulator,”Journal of Molecular Graphics and Modelling, Vol. 17, pp. 187–197.

    Article  Google Scholar 

  • Hamaker, H., 1937, “The London-Van Der Waals Attraction Between Spherical Particles,” Physica. Vol. 10. pp. 1058–1072.

    Article  Google Scholar 

  • Kim, D., Kim, K. and Hong, J., 2002, “Implementation of Self-Sensing MEMS Cantilevers for Nanomanipulation,” Proc. of the 4th Korean MEMS Conference, pp. 120–125.

  • Kim, P. and Lieber, C. 1999, “Nanotube Nanotweezers,” Science, Vol.286, pp. 2148–2150.

    Article  Google Scholar 

  • Park, J., Kim, D. Kim, T., Kim, B. and Lee, K., 2003, “Design and Performance Evaluation of a 3-DOF Mobile Microrobot for Micromani- pulation,”KSME international Journal, Vol. 17, No. 9, pp. 1268–1275.

    Google Scholar 

  • Requicha, A., 1999, “Massively Parallel Nanorobotics for Lithography and Data Storage,”International Journal of Robotics Research, Vol. 18, No. 3, pp. 344–350.

    Article  Google Scholar 

  • Requicha, A., 2001, “Layered Nanoassembly of Three-Dimensional Structures,” Proc. of 2001 IEEE Int’t Conf. on Robotics and Automation, pp. 3408–3411.

  • Sitti, M. and Hashimoto, H., 1999, “Tele-Nanorobotics using Atomic Force Microscope as a Robot and Sensor,” Advanced Robotics, Vol. 13. No. 4, pp. 417–436.

    Article  Google Scholar 

  • Sitti, M. and Hashimoto, H., 2000, “Controlled Pushing of Nanoparticles: Modeling and Experiments,”IEEE/ASME Transaction on Mechatronics, Vol. 5, pp. 199–211.

    Article  Google Scholar 

  • Sitti, M., 2001, “Nanotribological Characterization System by AFM Based Controlled Pushing,” Proc. of IEEE-NANO 2001, pp. 99–104.

  • Thompson, J. and Fearing, R., 2001, “Automating Microassembly with Ortho-Tweezers and Force Sensing,” Proc. of 2001 IEEE/RSJ Int'l. Conf. on Intelligent Robotics and Systems, pp. 1327–1334.

  • Visser, J., 1972, “On Hamaker Constants: A Comparison Between Hamaker Constants and Lifshitz-Vander Waals Constants.” Advances in Colloid and Interface Science, Vol.3, pp.331–363.

    Article  Google Scholar 

  • Zhou, Y. and Nelson, 2000, “The Eeffect of Material Properties and Gripping Force on Micrograsping,” Proc. of 2000 IEEE Int’l Conf. on Robotics and Automation, pp. 1115–1120.

Download references

Author information

Authors and Affiliations

  1. Microsystem Research Center, Korea Institute of Science and Technology, Cheongryang, P.O.BOX 131, 130-650, Seoul, Korea

    Deok-Ho Kim, Byungkyu Kim & Jong-Oh Park

Authors
  1. Deok-Ho Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Byungkyu Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Jong-Oh Park
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Byungkyu Kim.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kim, DH., Kim, B. & Park, JO. Implementation of a piezoresistive MEMS cantilever for nanoscale force measurement in micro/nano robotic applications. KSME International Journal 18, 789–797 (2004). https://doi.org/10.1007/BF02990297

Download citation

  • Received:

  • Revised:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02990297

Key Words

Search

Navigation