KSME International Journal

, Volume 18, Issue 5, pp 789–797 | Cite as

Implementation of a piezoresistive MEMS cantilever for nanoscale force measurement in micro/nano robotic applications

  • Deok-Ho Kim
  • Byungkyu Kim
  • Jong-Oh Park


The nanoscale sensing and manipulation have become a challenging issue in micro/nanorobotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/ nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in microrobotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a microrobotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

Key Words

Piezoresistive MEMS Cantilever Atomic Force Microscope (AFM) Microrobotics Micro Force Sensing. Van der Waals Force Micro/Nano-manipulation 


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. Arai, F., Lee, G. and Coltoti, R., 1998, “Integrated Microendeffector for Micromanipulation,”IEEE/ASME Transactions on Mechatronics, Vol. 3, No. 1, pp. 17–23.CrossRefGoogle Scholar
  2. Baselt, D., Lee, G. and Colton, R., 1996, “Biosensor Based on Force Microscope Technology,”Journal of Vacuum Science and Technology: B, Vol. 14, No. 2, pp. 789–793.CrossRefGoogle Scholar
  3. Burnham, N. and Kulik, A., 1999, “Surface Forces and Adhesion.” Handbook of Micro/Nanotribology, 2nd Edition. CRC Press, pp. 247–272.Google Scholar
  4. Dargahi, J., Parameswaran, M. and Payandeh, S., 2000, “A Micromachined Piezoelectric Tactile Sensor for an Endoscopie Grasper-Theory, Fabrication and Experiments,”Journal of Microelectromechanical Systems, Vol. 9, No. 3.Google Scholar
  5. Fearing, R., 1995, “Survey of Sticking Effects for Micro Parts Handling,” Proc. of 1995 IEEE/RSJ Int't. Conf. on Intelligent Robotics and Systems, Vol.2, pp. 212–217.Google Scholar
  6. Guthold, M., 1999, “Investigation and Modification of Molecular Structures with the Nanomanipulator,”Journal of Molecular Graphics and Modelling, Vol. 17, pp. 187–197.CrossRefGoogle Scholar
  7. Hamaker, H., 1937, “The London-Van Der Waals Attraction Between Spherical Particles,” Physica. Vol. 10. pp. 1058–1072.CrossRefGoogle Scholar
  8. Kim, D., Kim, K. and Hong, J., 2002, “Implementation of Self-Sensing MEMS Cantilevers for Nanomanipulation,” Proc. of the 4th Korean MEMS Conference, pp. 120–125.Google Scholar
  9. Kim, P. and Lieber, C. 1999, “Nanotube Nanotweezers,” Science, Vol.286, pp. 2148–2150.CrossRefGoogle Scholar
  10. Park, J., Kim, D. Kim, T., Kim, B. and Lee, K., 2003, “Design and Performance Evaluation of a 3-DOF Mobile Microrobot for Micromani- pulation,”KSME international Journal, Vol. 17, No. 9, pp. 1268–1275.Google Scholar
  11. Requicha, A., 1999, “Massively Parallel Nanorobotics for Lithography and Data Storage,”International Journal of Robotics Research, Vol. 18, No. 3, pp. 344–350.CrossRefGoogle Scholar
  12. Requicha, A., 2001, “Layered Nanoassembly of Three-Dimensional Structures,” Proc. of 2001 IEEE Int’t Conf. on Robotics and Automation, pp. 3408–3411.Google Scholar
  13. Sitti, M. and Hashimoto, H., 1999, “Tele-Nanorobotics using Atomic Force Microscope as a Robot and Sensor,” Advanced Robotics, Vol. 13. No. 4, pp. 417–436.CrossRefGoogle Scholar
  14. Sitti, M. and Hashimoto, H., 2000, “Controlled Pushing of Nanoparticles: Modeling and Experiments,”IEEE/ASME Transaction on Mechatronics, Vol. 5, pp. 199–211.CrossRefGoogle Scholar
  15. Sitti, M., 2001, “Nanotribological Characterization System by AFM Based Controlled Pushing,” Proc. of IEEE-NANO 2001, pp. 99–104.Google Scholar
  16. Thompson, J. and Fearing, R., 2001, “Automating Microassembly with Ortho-Tweezers and Force Sensing,” Proc. of 2001 IEEE/RSJ Int'l. Conf. on Intelligent Robotics and Systems, pp. 1327–1334.Google Scholar
  17. Visser, J., 1972, “On Hamaker Constants: A Comparison Between Hamaker Constants and Lifshitz-Vander Waals Constants.” Advances in Colloid and Interface Science, Vol.3, pp.331–363.CrossRefGoogle Scholar
  18. Zhou, Y. and Nelson, 2000, “The Eeffect of Material Properties and Gripping Force on Micrograsping,” Proc. of 2000 IEEE Int’l Conf. on Robotics and Automation, pp. 1115–1120.Google Scholar

Copyright information

© The Korean Society of Mechanical Engineers (KSME) 2004

Authors and Affiliations

  1. 1.Microsystem Research CenterKorea Institute of Science and TechnologySeoulKorea

Personalised recommendations