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Pramana

, Volume 9, Issue 1, pp 1–6 | Cite as

Some properties of indium-tin oxide films

  • M C Radhakrishna
  • M Ramakrishna Rao
Solids

Abstract

Thin films of indium-tin oxide have been deposited by DC diode sputtering from an indium-tin alloy target in an argon, hydrogen and oxygen atmosphere. Films with sheet resistance of 11 ohms/square and 80% light transmission have been obtained. The effect of cathode composition and gas mixture on sheet resistance and optical transmission properties of the films have been studied.

Keywords

Indium-tin oxide films optical properties of thin films reactive evaporation 

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Copyright information

© the Indian Academy of Sciences 1977

Authors and Affiliations

  • M C Radhakrishna
    • 1
  • M Ramakrishna Rao
    • 1
  1. 1.Central Instruments and Services LaboratoryIndian Institute of ScienceBangalore

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