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Journal of Electronic Materials

, Volume 22, Issue 8, pp 865–871 | Cite as

Effects of growth rate and mercury partial pressure on twin formation in HgCdTe (111) layers grown by metalorganic chemical vapor deposition

  • K. Shigenaka
  • L. Sugiura
  • F. Nakata
  • K. Hirahara
Special Issue Paper

Abstract

The relationship between twin formation and the growth conditions for (111) HgCdTe epitaxial layers grown by metalorganic chemical vapor deposition was investigated. The existence of twins was confirmed by x-ray diffraction and cross-sectional transmission electron microscopy. The x-ray diffraction intensity of the 180°ø rotated 422 asymmetric reflection with that of the 422 asymmetric reflection was compared to detect the presence of twins. The layer obtained using a low growth rate and a low Hg partial pressure showed double-positioning (DP) twins. The twins became lamellar as the growth rate increased. Twin-free HgCdTe epitaxial layers were obtained under a high growth rate and a high Hg partial pressure. These results suggest a model for twin formation based on the difference in the growth mechanism of HgTe and CdTe. Twin-free (111) HgCdTe epitaxial layers were reproducibly obtained without using inclined substrates by optimizing the growth conditions by using this model.

Key words

CdTe HgCdTe MOVPE TEM twin formation 

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Copyright information

© The Minerals, Metals & Materials Society 1993

Authors and Affiliations

  • K. Shigenaka
    • 1
  • L. Sugiura
    • 1
  • F. Nakata
    • 1
  • K. Hirahara
    • 1
  1. 1.Research and Development CenterToshiba CorporationKawasakiJapan

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