Journal of Electronics (China)

, Volume 5, Issue 4, pp 285–293 | Cite as

Deep levels related to copper in silicon

  • Chen Kaimao
  • Wang Zhongan


Energy positions and carrier capture cross sections of the deep levels related to copper in silicon are measured by the DLTS. The annealing behaviour and spatial distributions of some of these levels are also studied. The results show that there are no triple acceptor or quadruple states corresponding to the substitutional copper in silicon, which have been reported in literature. Most of the deep levels related to copper in silicon correspond to complexes of copper and defects in silicon.

Key Words

Semiconductor Silicon Deep level DLTS 


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. [1]
    R. N. Hall, J. H. Racette,J. Appl. Phys.,35(1964), 379.CrossRefGoogle Scholar
  2. [2]
    J. W. Chen, A. G. Milnes,Ann. Rev. Mater. Sci.,10(1980), 157.CrossRefGoogle Scholar
  3. [3]
    A. M. Salma,J. Electronchem. Soc.,126(1979), 114.CrossRefGoogle Scholar
  4. [4]
    C. S. Fuller, J. C. Severins,Phys. Rev.,96(1954), 21.CrossRefGoogle Scholar
  5. [5]
    C. J. Gallagher,J. Phys. Chem. Solids,3(1957), 82.CrossRefGoogle Scholar
  6. [6]
    C. B. Collins, R. O. Carlson,Phys. Rev.,108(1957), 1409.CrossRefGoogle Scholar
  7. [7]
    T. Nakano, Y. Inuishi,Jpn, J. Phys. Soc.,19(1964), 851.CrossRefGoogle Scholar
  8. [8]
    E. R. Weber,Appl. Phys.,A 30(1983), 1.CrossRefGoogle Scholar
  9. [9]
    S. M. Sze, J. C. Irvin,Solid-St. Electron.,11(1968), 599.CrossRefGoogle Scholar
  10. [10]
    A. G. Milnes, Deep Impurities in Semiconductors, Wiley, New York, (1973), p. 14.Google Scholar
  11. [11]
    M. Schulz,Appl. Phys.,4(1974), 225.CrossRefGoogle Scholar
  12. [12]
    A. A. Lebedev, M. M. Akhmedova,Sov. Phys. Semicond.,10(1976), 1130.Google Scholar
  13. [13]
    M. M. Akhmedova, L. S. Berman, L. S. Kostina, A. A. Lebedev,Sov Phys. Semicond.,10(1976), 140.Google Scholar
  14. [14]
    N. Toyama,Solid-St. Electron.,26(1983), 37.CrossRefGoogle Scholar
  15. [15]
    L. C. Kimerling, J. L. Benton, J. J. Rubin,Deffects and Radiation Effects in Semiconductors,59(1980), 217.Google Scholar

Copyright information

© Science Press 1988

Authors and Affiliations

  • Chen Kaimao
    • 1
  • Wang Zhongan
    • 1
  1. 1.Department of PhysicsPeking UniversityBeijing

Personalised recommendations