Alumina-silica composite coatings on graphite by CVD at 550°C
Alumina-silica composite coatings were prepared on the surface of graphite paper by chemical vapor deposition using AlCl3/SiCl4/H2/CO2 as precursor in the temperature range of 300 to 550°C. X-ray diffraction (XRD) and scanning electron microscopy (SEM) were used to examine the phase composition and the microstructure of the coating, respectively. The results indicated that a dense, uniform, and adherent alumina-silica composite coating can be prepared on graphite paper substrate by chemical vapor deposition at 550°C. Alumina-silica composite coating is composed of particles or nodules of varying size. Each particle is often composed of a number of finer particles. The phases of the 550°C composite coating include γ-alumina and amorphous silica. The elemental chlorine content in the composite coating decreases with increasing deposition temperature. The surfaces of the alumina-silica composite coatings are affected by deposition temperature. There are some obvious micro-cracks in the 300°C composite coating, which are attributed to a mismatch of the coefficient of thermal expansion between composite coating and graphite paper. The 550°C alumina-silica composite coating can be completely turned into mullite after heat-treatment at 1350°C for 0.5 hr in argon atmosphere.
KeywordsAlumina-silica composite coatings graphite paper chemical vapor deposition mullitization
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