Bulletin of Materials Science

, Volume 17, Issue 7, pp 1415–1434 | Cite as

Studies of diamond-like carbon films prepared by ion beam-assisted deposition

  • Heng-de Li
  • Xiao-Ming He


Ion beam-assisted deposition offers a novel and unique process to prepare diamond-like carbon (DLC) films at room temperature, with particularly good interface adhesion. This advantage was explored in this study to deposit highly wear-resistant coating on bearing 52100 steel. Both dual ion beam sputtering and ion beam deposition were employed. Various bombarding species and energy were investigated to optimize the process. Raman, X-ray photoelectron and Auger electron spectroscopy were used to characterize the bonding structure of DLC. Extensive experiments were carried out to examine the tribological behaviour of the DLC/52100 system. A metal intermediate layer can help tremendously in wear resistance. The results are optimistic and may lead to useful applications.


Diamond-like carbon films ion-beam assisted deposition 


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Copyright information

© the Indian Academy of Sciences 1994

Authors and Affiliations

  • Heng-de Li
    • 1
  • Xiao-Ming He
    • 1
  1. 1.Department of Materials Science and EngineeringTsinghua UniversityBeijingPeople’s Republic of China

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