Microsystem Technologies

, Volume 2, Issue 1, pp 153–156 | Cite as

LIGA and LIGA-like processing with high energy photons

  • H. Guckel
Technical Papers


High energy X-rays, in the present case photons near 20,000 eV, can be used in LIGA-like processing. Heating problems with this type of photon flux can be avoided by proper filtration via transmission filters. The exposure of PMMA with high energy photons leads to cost effective exposures with full cost recovery estimates of $0.10 per square centimeter at 200 μm photoresist thickness. The cost advantage originates from increased PMMA absorption lengths and the ability to fabricate large area masks without diaphragms which permit large exposure fields.


PMMA High Energy Photon Absorption Length PMMA Layer Transmission Filter 
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  1. 1.
    Becker EW;Ehrfeld W;Hagman P;Maner A;Münchmeyer D (1986) Fabrication of Micro-structures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoformung, and Plastic Moulding. Microelectronic Engineering, 4 pp. 35–56.CrossRefGoogle Scholar
  2. 2.
    Guckel H; Skrobis KJ; Klein J; Christenson TR; Wiegele T (1993) Deep X-Ray Lithography for Micromechanics. Proc. SPIE's Int. Symp. on Holography, Microstructures and Laser Technologies, Quebec City, Canada, August 15–21, pp. 290–297.Google Scholar
  3. 3.
    Löchel B; Maciossek A; König M; Quenzer HJ; Wagner B (1995) Electroplated Electromagnetic Components for Actuators. Proceedings of Actuator 94, Bremen, Germany, June 15–17, pp. 109–113Google Scholar

Copyright information

© Springer-Verlag 1995

Authors and Affiliations

  • H. Guckel
    • 1
  1. 1.Wisconsin Center for Applied Microelectronics Department of Electrical and Computer EngineeringUniversity of WisconsinMadisonU.S.A.

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