LIGA and LIGA-like processing with high energy photons
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High energy X-rays, in the present case photons near 20,000 eV, can be used in LIGA-like processing. Heating problems with this type of photon flux can be avoided by proper filtration via transmission filters. The exposure of PMMA with high energy photons leads to cost effective exposures with full cost recovery estimates of $0.10 per square centimeter at 200 μm photoresist thickness. The cost advantage originates from increased PMMA absorption lengths and the ability to fabricate large area masks without diaphragms which permit large exposure fields.
KeywordsPMMA High Energy Photon Absorption Length PMMA Layer Transmission Filter
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