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Microsystem Technologies

, Volume 2, Issue 1, pp 104–108 | Cite as

Fabrication of LIGA-acceleration sensors by aligned molding

  • A. Both
  • W. Bacher
  • M. Heckele
  • K. -D. Müller
  • R. Ruprecht
  • M. Strohrmann
Technical Papers
  • 32 Downloads

Abstract

A technology for the fabrication of movable LIGA-Microstructures by molding was developed, which enables the cheaper production of e.g. LIGA-Acceleration Sensors [1]. For this purpose an aligned molding process had to be developed. The realized experimental setup consists of two subsystems, the molding machine and the alignment arrangement [2]. After aligning a substrate it is transported into the molding machine. An effective and extremely precise dimension translation system is required. Although during modling temperature changes appear and high forces are applied, the dimension stability during the molding process has to be guaranteed. The presented system and setup deals successfully with these conditions. An alignment quality of ± 10 μm is realized. Using the aligned molding technology temperature compensated LIGA-acceleration sensors [1] were fabricated. The proper function of the sensors was demonstrated.

Keywords

PMMA Molding Process Molding Machine Acceleration Sensor Sacrificial Layer 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    A. Both et al.: Quasimonolithic Integration of LIGA Microstructures and Micro-electronic Circuits; To be published in Sensors and MaterialsGoogle Scholar
  2. 2.
    U. Wallrabe et al.: Entwicklung, Optimierung und Test von elektrostatischen Mikromotoren nach dem LIGA-Verfahren; KfK-Bericht Nr. 5088; September 1992Google Scholar
  3. 3.
    C. Burbaum et al.: Herstellung von mikromechanischen Beschleunigungssensoren in LIGA-Technik; KfK-Bericht Nr. 4859; April 1991Google Scholar
  4. 4.
    M. Strohrmann: Acceleration sensor with integrated compensation of temperature effects fabricated by the LIGA-Process; Eurosensors VII, BudapestGoogle Scholar

Copyright information

© Springer-Verlag 1995

Authors and Affiliations

  • A. Both
    • 1
  • W. Bacher
    • 1
  • M. Heckele
    • 1
  • K. -D. Müller
    • 1
  • R. Ruprecht
    • 1
  • M. Strohrmann
    • 1
  1. 1.Institut für MikrostrukturtechnikForschungszentrum KarlsruheKarlstruheGermany

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