Journal of Electronic Materials

, Volume 19, Issue 3, pp 235–239 | Cite as

Preparation of high Tc (Yb, Y)Ba2Cu3O7-δ thin films by co-evaporation from effusion cells

  • E. Coleman
  • T. Siegrist
  • J. J. Yeh
Letter Section


We have prepared superconducting thin films of (Yb,Y)Ba2Cu3O7-δ by evaporation of copper, ytterbium or yttrium, and barium fluoride from Knudsen effusion cells. A simple two chamber vacuum system produced stable evaporation rates of 5–10 nm/min using various Knudsen cells without realtime feedback control. Excellent stoichiometry was obtained in the films by optimizing the deposition of Cu from a dual filament cell, Yb from a single filament cell and Y and BaF2 from high temperature cells. Films were deposited mainly on SrTiO3 substrates at temperatures ranging from 120 to 600° C and O2 partial pressure up to 1.5 ⋻ 10−5 Torr. Post deposition anneals in O2 and O2 + H2O produced films with room temperature resistivities as low as 227μΩ-cm andT c (R = 0) at 91 K. Films were characterized using x-ray diffractometry, Rutherford backscattering spectrometry, energy dispersive x-ray analysis, scanning electron microscopy as well as electronic transport measurements.

Key words

Effusion cell deposition oxide superconductor thin films 


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Copyright information

© The Minerals, Metals and Materials Society 1990

Authors and Affiliations

  • E. Coleman
    • 1
  • T. Siegrist
    • 1
  • J. J. Yeh
    • 1
  1. 1.AT&T Bell LaboratoriesMurray Hill

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