Korean Journal of Chemical Engineering

, Volume 15, Issue 5, pp 552–555 | Cite as

Application of Silicalite-1 film to a surface acoustic wave device sensor

  • Man-Kyu Jung
  • Sung-Sun Hong
  • Man-Hoe Kim


Preparation of silicalite film on a single crystal quartz and its application as a SAW device were investigated. A layer of silicalite crystals was synthesized on a delay line in an interdigital transducer having a dual delay line configuration through the vapor phase transport method. To study the sensitivity and selectivity as a chemical sensor, the SAW sensor was tested in N2 flow containing vapors of water, acetone, and benzene, respectively. In this study, the sensitivities of the silicalite-coated delay line became tripled for moisture, doubled for acetone, and increased for benzene,compared to that of the bare delay line.

Key words

SAW Device Silicalite Film Vapor Phase Transport Method 


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Copyright information

© Korean Institute of Chemical Engineering 1998

Authors and Affiliations

  1. 1.Department of Chemical EngineeringChungbuk National UniversityCheongjuKorea
  2. 2.Department of ChemistryAir Force AcademyChungbukKorea

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