Abstract
Preparation of silicalite film on a single crystal quartz and its application as a SAW device were investigated. A layer of silicalite crystals was synthesized on a delay line in an interdigital transducer having a dual delay line configuration through the vapor phase transport method. To study the sensitivity and selectivity as a chemical sensor, the SAW sensor was tested in N2 flow containing vapors of water, acetone, and benzene, respectively. In this study, the sensitivities of the silicalite-coated delay line became tripled for moisture, doubled for acetone, and increased for benzene,compared to that of the bare delay line.
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Jung, MK., Hong, SS. & Kim, MH. Application of Silicalite-1 film to a surface acoustic wave device sensor. Korean J. Chem. Eng. 15, 552–555 (1998). https://doi.org/10.1007/BF02707108
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DOI: https://doi.org/10.1007/BF02707108