Application of Silicalite-1 film to a surface acoustic wave device sensor
Preparation of silicalite film on a single crystal quartz and its application as a SAW device were investigated. A layer of silicalite crystals was synthesized on a delay line in an interdigital transducer having a dual delay line configuration through the vapor phase transport method. To study the sensitivity and selectivity as a chemical sensor, the SAW sensor was tested in N2 flow containing vapors of water, acetone, and benzene, respectively. In this study, the sensitivities of the silicalite-coated delay line became tripled for moisture, doubled for acetone, and increased for benzene,compared to that of the bare delay line.
Key wordsSAW Device Silicalite Film Vapor Phase Transport Method
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