Metalorganic chemical vapor deposition of ferroelectric Pb(ZrxTi1- xO3thin films
Ferroelectric Pb(ZrxTi1-x)O3 (PZT) thin films were successfully deposited on Pt/Ti/SiO2Si substrates by metalorganic chemical vapor deposition (MOCVD). Pb(C2H5)4, Zr(O-t-C4H9)4, and Ti(O-i-C3H7)4 were used as metalorganic precursors. Variations in crystalline structure, surface morphology, and grain size of deposited films were systematically investigated as a function of process parameters by using X-ray diffraction and scanning electron microscopy. The deposition temperature and gas composition in the reactor are the main parameters that control the microstructure and composition of films. An interrelationship between the grain orientation and surface roughness of the films was found. Films with (111) preferred orientation are significantly smoother than films with other preferred orientations. The ferroelectric properties of the films were also measured by RT66A ferroelectric tester for hysteresis loop and fatigue property. Electrical measurements revealed that the films had good ferroelectric characteristics with the high remanant polarization (32 μC/cm2) and low coercive voltage (1.1 V).
Key wordsMOCVD PZT Thin Film Ferroelectric FRAM
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- Keijser, M., Veldhoven, P. J. and Dormans, G. J. M., “Organometallic Chemical Vapor Deposition of Lead Zirconate Titanate Thin Films”,Mat. Res. Soc Symp. Proc.,310, 223 (1993).Google Scholar
- Saenger, K. L., Roy, R. A., Etzold, K. F. and Cuomo, J. J., “Lead Zirconate Titanate Films Produced by Pulsed Laser Deposition”,Mat. Res. Soc. Symp. Proc,200, 115 (1990).Google Scholar
- Shimizu, M., Fujimoto, M., Katayama, T., Shiosaki, T., Nakaya, K., Fukagawa, M. and Tanikawa, E.,“Growth and Charaterization of Ferroelectric Pb(Zr,Ti)O3 Thin Films by MOCVD Using a 6 Inch Single Wafer CVD System”,Mat. Res. Soc. Symp. Proc.,310, 255 (1993).Google Scholar
- Tuttle, B. A., Headley, T. J., Bunker, B. C., Schwartz, R. W., Zender, T. J., Hernandez, C. L., Goodnow, D. C., Tissot, R. J. and Michel, J.,“Microstructural Evolution of Pb(Zr, Ti)O3 Thin Films Prepared by Hybrid Metallo-Organic Decomposition”,J. Mater. Res.,7(7), 1876 (1992).CrossRefGoogle Scholar