Abstract
Investigation of the propagation of the wave in SAW sensors is a basis for the research and design of the sensors. With the advance of the sensor, both the effect of environment on the surface ply and the geometry of waveguide are complicated. To consider the complication, a model with gradient surface ply and multilayer waveguide of SH wave propagation in sensor is proposed. The equation of wave velocity is derived by a transfer matrix method. Through the equation, the function of wave velocity increment via the change of parameters in the surface ply is obtained. The effect of the inhomogeneity on the function is also studied. Finally, some influencing factors of the behavior of the sensor are discussed.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Moussa Hoummady, Andrew Campitelli, Wojtek Wlodarsk. Acoustic wave sensor: design, sensing mechanisms and applications.Smart Mater Struct, 1997, 6(6): 647–657
Wang Chengying. Surface acoustic wave. In Ultrasonic. Beijing: Science Press, 1996 (in Chinese)
Jin Changshan. Ultrasonic Technology. Harbin: Harbin Technology University Press, 1989 (in Chinese)
Electra Gizeli, Christopher RL, Martha L, Horst V. Detection of supported lipid layers with the acoustic Love waveguide device: application to biosensors.Sensor and Actuator, 1996, B 34: 295–300
Caliendo C, Amico AD', Veradi P, Verona E. Surface acoustic wave H2 sensor on silicon substrates.Proc IEEE Ultrasonics Symp, 1998: 569–574
Motamedi ME, White RM. Acoustic sensors. In: Sze SM ed. Semiconductor Sensors. John Wiley & Sons Inc, 1994. 97–151
Electra Gizeli. Design consideration for the acoustic waveguide biosensor.Smart Mater Struct, 1997, 6(6): 700–706
Joshi SG, Jin Y. Propagation of ultrasonic lamb waves in piezoelectric plates.J Appl Phys, 1991, 70(8): 4113–4120
Zaitsev BD, Joshi SG, Kuznetsova IE. Investigation of quasi-shear-horizontal acoustic waves in thin plates of lithium niobate.Smart Mater Struct, 1997 6(6): 739–744
Bernhard Jakoby, Michael J Vellekoop. Properties of Love wave: applications in sensor.Smart Mater Struct, 1997, 6(6): 668–679
Kaliski Sylwester, Rymarz CZ, Sobczyk K, Wlodarczyk E. Vibrations and Wave, Part B: Waves. Warsaw: Elsevier, 1992
Fahmy AH, Adler EL. Propagation of acoustic surface waves in multilayers: A matrix description.Appl Phys Lett, 1973, 22(10): 495–497
Author information
Authors and Affiliations
Additional information
This study was supported by the National Natural Science Foundation of China (No. 59635140), the Doctoral Education Foundation of the Ministry of Education of China and Aeronautics Foundation of China.
Rights and permissions
About this article
Cite this article
Wei, L., Yapeng, S. Gradient surface ply model of SH wave propagation in SAW sensors. Acta Mech Sinica 15, 155–163 (1999). https://doi.org/10.1007/BF02485880
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02485880