Abstract
In this paper, we present the applications of Boundary Element Method (BEM) to simulate the electro-mechanical coupling responses of Micro-Electro-Mechanical systems (MEMS). The algorithm is programmed in our research group based on BEM modeling for electrostatics and elastostatics. Good agreement is shown while the simulation results of the pull-in voltages are compared with the theoretical/experimental ones for some examples.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Gilbert JR, Legtenberg R, Senturia SD. 3-D coupled electro-mechanics for MEMS. In: Proc MEMS'95, Amsterdam: IEEE, 1995, 122–127.
Aluru NR, White J. An efficient numerical technique for electromechanical simulation of complicated microelectromechanical structures.Sensors and Actuators A, 1997, 58:1–11
Fang J, Zhang WB, Wang CS, et al. Electromechanical analysis of microelectromechanical structures and dynamic simulations of laterally vibratory microgyroscope.Proc. of SPIE, 2001, 4407:68–77
Wrobel LC. The Boundary Element Method. 1st edition, John Wiley & Sons, 2002
De Los Santos, Hector J. Introduction to Microelectromechanical (MEM) Microwave Systems, Boston: Artech House, 1999
Li ZH, Zhang DC, Li T, et al. Bulk micromachined relay with lateral contact.J Micromech Microeng, 2000, 10:329–333
Author information
Authors and Affiliations
Additional information
The project supported by the 973 Program (G199033108) and the national Natural Science Foundation of China (10125211)
Rights and permissions
About this article
Cite this article
Kai, Z., Yunjum, C., Chunyang, X. et al. Electro-mechanical coupling analysis of MEMS structures by boundary element method. Acta Mech Sin 20, 185–191 (2004). https://doi.org/10.1007/BF02484264
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02484264