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System-level simulation of vibratory micromachined gyroscope with fence structure

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Abstract

An equivalent circuit model of a novel fence structure vibratory micromachined gyroscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation. Equivalent circuit model of oscillating and differential detection capacitance model are implemented in the circuit simulation tool PSPICE, which is available in oscillating properties analysis such as oscillating's transient response, steady response and frequency response to angular rate to optimize working mode of the gyroscope. The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system. Behavioral simulation of the system is performed to prove the function of detection circuits. The simulation results and measurement results show that the design of circuits is feasible.

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Authors and Affiliations

  1. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 200050, Shanghai, China

    Che Lufeng, Xiong Bin & Wang Yuelin

Authors
  1. Che Lufeng
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  2. Xiong Bin
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  3. Wang Yuelin
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Additional information

The project supported by the Major State Basic Research Development Program “Integrated Micro-Optical-Electro-Mechanical System” (G1999033101)

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Lufeng, C., Bin, X. & Yuelin, W. System-level simulation of vibratory micromachined gyroscope with fence structure. Acta Mech Sin 20, 172–177 (2004). https://doi.org/10.1007/BF02484262

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  • DOI: https://doi.org/10.1007/BF02484262

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