Abstract
A novel laser processing technique was developed for making channels in the nano regime in this paper. A Nd:YAG laser was used to dry fabricate micro channels (25μm∼100 μm diameter) in a 1 cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are smooth and with extremely high aspect ratio (∼104 depth to width ratio). A possible mechanism is proposed to explain the formation of the nano channels. This laser-based nano channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.
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The project supported by the National Natural Science Foundation of China (50375031) and the Hong Kong Research Grants Council (CUHK 4416/99E)
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Qin, S.J., Li, W.J. Analysis of nano channel formation in quartz cubes by laser-induced process. Acta Mech Sin 20, 125–131 (2004). https://doi.org/10.1007/BF02484255
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DOI: https://doi.org/10.1007/BF02484255