Skip to main content
SpringerLink
Log in

Electrical properties of thin oxidized aluminium films

  • Papers
  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

Thin aluminium films of thickness 40 to 200 nm were deposited on to glass substrates at 573 K in a high vacuum. The deposition was carried out layer by layer and the interfaces between these layers were exposed to oxygen. The electrical resistivity was studied as a function of the film thickness, annealing time, annealing temperature and oxygen pressure. The temperature coefficient of resistivity and the activation energy for the conduction electrons were studied as a function of the film thickness and oxygen pressure. Fuchs-Sondheimer theory for electrical conduction was applied to the experimental results. The mean free path of the conduction electrons was calculated as a function of temperature and agreed well with the theoretical relation.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. A. Mayadas, J. Appl. Phys. 39 (1968) 4241.

    Article  CAS  Google Scholar 

  2. A. Mayadas, F. Feder and R. Rosenberg, J. Vac. Sci. Technol. 6 (1969) 690.

    Article  CAS  Google Scholar 

  3. T. Jayadevaish and R. Kirby, Appl. Phys. Lett. 15 (1969) 150.

    Article  Google Scholar 

  4. J. Reimer, J. Vac. Sci. Technol. A2 (1984) 242.

    Article  Google Scholar 

  5. F. Reicha, Candidate dissertation, Budapest, Hungary (1982).

  6. E. Dobierzewska-Morzrzmyas, P. Bieganski, A. Rados and A. Bochenek, Thin Solid Films 102 (1983) 77.

    Article  Google Scholar 

  7. E. Tochiskii and N. Belyavskii, Phys. Status Solidi (a) 61 (1980) K21.

    Article  Google Scholar 

  8. C. Tellier and A. Tosser, Thin Solid Films 37 (1976) 207.

    Article  CAS  Google Scholar 

  9. P. Desai, H. James and C. Ho, J. Phys. Chem. Ref. Data 13 (1984) 1131.

    Article  CAS  Google Scholar 

  10. R. Simons and R. Balluffi, Phys. Rev. 117 (1960) 62.

    Article  Google Scholar 

  11. R. Seth and S. Woods, ibid. B2 (1970) 2961.

    Article  Google Scholar 

  12. P. Barna and F. Reicha, in Proceedings of 8th International Vacuum Congress, Cannes, September 1980, Vol. 1, SupplE. Vide, Les Couches Minces N201 (1980) p. 165.

  13. Á. Barna, P. Barna, G. Radnoczi, F. Reicha and L. Toth, Phys. Status Solidi (a) 55 (1979) 427.

    Article  CAS  Google Scholar 

  14. M. A. El Hiti, Rev. Physique Appl. 257 (1990) 775.

    Article  Google Scholar 

  15. M. Angadi, J. Mater. Sci. 20 (1985) 761.

    Article  CAS  Google Scholar 

  16. M. El Hiti and M. Ahmed, Phys. Status Solidi (a) 114 (1989) 185.

    Article  Google Scholar 

  17. K. Fuchs, Proc. Camb. Phil. Soc. 34 (1938) 100.

    Article  CAS  Google Scholar 

  18. E. Sondheimer, Adv. Phys. 1 (1952) 1.

    Article  Google Scholar 

  19. C. Kittel, “An Introduction to Solid State Physics”, 3rd Edn (Wiley Eastern Private, New Delhi, 1971) p. 220.

    Google Scholar 

  20. H. Hall, “Solid State Physics” (Wiley, Bristol, England, 1974) p. 233.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Physics, Faculty of Science, Mansura University, Mansura, Egypt

    F. M. Reicha

  2. Department of Physics, Faculty of Science, Tanta University, Tanta, Egypt

    M. A. El Hiti

  3. Research Institute for Technical Physics HAS, PO Box 76, H-1325, Budapest, Hungary

    P. B. Barna

Authors
  1. F. M. Reicha
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. A. El Hiti
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. P. B. Barna
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Reicha, F.M., El Hiti, M.A. & Barna, P.B. Electrical properties of thin oxidized aluminium films. J Mater Sci 26, 2007–2014 (1991). https://doi.org/10.1007/BF00549159

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00549159

Keywords

Search

Navigation