Preparation, composition and some properties of codeposited TiB2-TiCx-coatings

Abstract

Heterogeneous TiCx and TiB2 containing layers have been deposited from the gas phase onto hard metal and tantalum substrates in a cold wall reactor. The process parameters were thermodynamically calculated and verified by experiments. The deposited layers have been characterized regarding the chemical composition, structure, microhardness and abrasion wear. In a large composition range a characteristic layer structure is observed. Microhardness and abrasion wear run in dependence on the layer composition through a peak factor.

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Bartsch, K., Leonhardt, A., Wolf, E. et al. Preparation, composition and some properties of codeposited TiB2-TiCx-coatings. J Mater Sci 26, 4318–4322 (1991). https://doi.org/10.1007/BF00543645

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Keywords

  • Polymer
  • Layer Structure
  • Tantalum
  • Composition Range
  • Abrasion Wear