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Fabrication and characterization of thin films with perpendicular magnetic anisotropy for high-density magnetic recording

Part I A review

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Abstract

Perpendicular magnetic anisotropy (PMA) was first observed in thin films of cobalt-chromium alloys in 1974, and perpendicular magnetic recording was proposed in 1977. After less than ten years, a new technology for high-density magnetic recording is firmly established. This breakthrough of the science and technology of magnetic recording has been made possible mainly through the ingenuity and concerted efforts of researchers. The preparation, characterization, and application of the Co-Cr films featuring PMA have been extensively studied. This paper reviews the large number of reports on PMA films with emphasis on three areas: 1. processing of PMA films; 2. correlation of magnetic properties and microstructures of PMA films; and 3. state-of-art techniques for fabricating PMA films.

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Abbreviations

PMA:

Perpendicular magnetic anisotropy

PMR:

Perpendicular magnetic recording

B :

Magnetic induction

H :

Magnetic field

H c :

Coercivity

H c,⊥ :

Perpendicular coercivity

H d :

Demagnetizing field

H k :

Anisotropy field

H ⊥ :

Perpendicular anisotropy constant

M r :

Remanent magnetization

Ms :

Saturation magnetization

P Ar :

Argon pressure

T s :

Substrate temperature

V b :

Substrate bias voltage

α:

Incidence angle

δθ50 :

Half-width dispersion angle in the rocking curve

θc :

Curie temperature

σ0 :

Internal stress

References

  1. M. H. Kryder and A. B. Bortz, Phys. Today Dec (1984) 20.

    Google Scholar 

  2. S.-I. Iwasaki and K. Takemura, IEEE Trans. Magn. MAG-11 (1975) 1173.

    Google Scholar 

  3. S.-I. Iwasaki and Y. Nakamura, ibid. MAG-13 (1977) 1272.

    CAS  Google Scholar 

  4. A. H. Eltoukhy, J. Vac. Sci. Tech. A4 (1986) 539.

    Google Scholar 

  5. J. K. Howard, ibid. A4 (1986) 1.

    Google Scholar 

  6. C. Bonnebat, IEEE Trans. Magn. MAG-23 (1987) 9.

    Google Scholar 

  7. Chih-Wen Chen, in “Magnetism and Metallurgy of Soft Magnetic Materials” (Dover Publications, New York, 1986).

    Google Scholar 

  8. T. Chen and P. L. Cavallotti, Appl. Phys. Lett. 41 (1982) 205.

    CAS  Google Scholar 

  9. M. Shiraki, Y. Wakii, T. Tokushima and H. Tsuya, IEEE Trans. Magn. MAG-21 (1985) 1465.

    CAS  Google Scholar 

  10. W. Andra, H. Danan and U. Ropke, ibid. MAG-20 (1984) 102.

    Google Scholar 

  11. C. Kooy and U. Enz, Philips Res. Rep. 15 (1960) 7.

    Google Scholar 

  12. J. Kaczer, J. Appl. Phys. 29 (1958) 569.

    CAS  Google Scholar 

  13. S. Honda, T. Yamakawa and T. Kusuda, IEEE Trans. Magn. MAG-21 (1985) 1468.

    CAS  Google Scholar 

  14. V. M. Fedosyuk, L. F. Ilyushenko, M. U. Sheleg and A. V. Boltushkin, Thin Solid Films 158 (1988) 7.

    Google Scholar 

  15. R. F. Soohoo, J. Appl. Phys. 55 (1984) 2211.

    Google Scholar 

  16. J. S. Nelson, C. Y. Fong and I. P. Batra, ibid. 63 (1988) 3049.

    CAS  Google Scholar 

  17. S.-I. Iwasaki, IEEE Trans. Magn. MAG-16 (1980) 71.

    CAS  Google Scholar 

  18. Ibid., Recent Magn. Electron. 10 (1983) 101.

    Google Scholar 

  19. R. I. Potter and I. A. Beardsley, IEEE Trans. Magn. MAG-16 (1980) 967.

    Google Scholar 

  20. I. B. Ortenburger and R. I. Potter, J. Appl. Phys. 50 (1979) 2393.

    Google Scholar 

  21. I. S. Beardsley, ibid. 53 (1982) 2582.

    CAS  Google Scholar 

  22. T. R. Koehler, ibid. 55 (1984) 2214.

    Google Scholar 

  23. P. Silvester and M. V. K. Chari, IEEE Trans. Power App. Syst. PAS-89 (1970) 1642.

    Google Scholar 

  24. T. Suzuki and S.-I. Iwasaki, IEEE Trans. Magn. MAG-18 (1982) 769.

    CAS  Google Scholar 

  25. I. A. Beardsley and C. Tsang, J. Appl. Phys. 55 (1984) 2208.

    Google Scholar 

  26. Y. Nakamura, S. Yamamoto and S.-I. Iwasaki, IEEE Trans. Magn. MAG-22 (1986) 376.

    Google Scholar 

  27. J. Hokkyo, I. Saito and S. Satake, ibid. MAG-16 (1980) 887.

    Google Scholar 

  28. H. N. Bertram, ibid. MAG-21 (1985) 1397.

    Google Scholar 

  29. N. H. Yeh, ibid. MAG-21 (1985) 1338.

    Google Scholar 

  30. K. Shinagawa, H. Fujiwara, F. Kugiya, T. Okuwaki and M. Kudo, J. Appl. Phys. 53 (1982) 2585.

    CAS  Google Scholar 

  31. S.-I. Iwasaki, Y. Nakamura and K. Ouchi, IEEE Trans. Magn. MAG-15 (1980) 1456.

    Google Scholar 

  32. V. B. Minuhin, ibid. MAG-22 (1986) 388.

    Google Scholar 

  33. J.-G. Zhu and H. N. Bertram, ibid MAG-22 (1986) 379.

    Google Scholar 

  34. K. Fukuda, Y. Kitahara, F. Maruta and J. Ezaki, ibid. MAG-18 (1982) 1116.

    CAS  Google Scholar 

  35. C. W. Chen and C. S. Alford, J. Vac. Sci. Tech. A6 (1988) 128.

    Google Scholar 

  36. S. I. Iwasaki and K. Ouchi, IEEE Trans. Magn. MAG-14 (1978) 849.

    CAS  Google Scholar 

  37. J. W. Smits and F. J. A. Den Broeder, Thin Solid Films 127 (1985) 1.

    CAS  Google Scholar 

  38. H. Tamai, K. Tagami and H. Hayashida, IEEE Trans. Magn. MAG-24 (1988) 2347.

    Google Scholar 

  39. J. C. Allan and R. D. Fisher, ibid. MAG-23 (1987) 122.

    CAS  Google Scholar 

  40. T. Yamada, N. Tani, M. Ishikawa, Y. Ota, K. Nakamura and A. Itoh, ibid. MAG-21 (1985) 1429.

    CAS  Google Scholar 

  41. K. Kobayashi and G. Ishida, J. Appl. Phys. 52 (1981) 2453.

    CAS  Google Scholar 

  42. J. Tada, M. Akihiro, K. Takei, T. Satoh and T. Suzuki, IEEE Trans. Magn. MAG-22 (1986) 343.

    CAS  Google Scholar 

  43. T. Suzuki and N. Yoshida, J. Appl. Phys. 63 (1989) 2929.

    Google Scholar 

  44. H. Awano and H. Masuya, IEEE Trans. Magn. MAG-23 (1987) 2067.

    CAS  Google Scholar 

  45. K. Inoue, M. Yoshikiyo and S. Yoshii, ibid. MAG-23 (1987) 3651.

    CAS  Google Scholar 

  46. S.-I. Iwasaki, K. Ouchi and N. Honda, ibid. MAG-16 (1980) 1111.

    CAS  Google Scholar 

  47. J. A. Thompson and D. A. Stevenson, J. Appl. Phys. 61 (1987) 3155.

    CAS  Google Scholar 

  48. P. E. Carcia, ibid. 63 (1988) 5066.

    CAS  Google Scholar 

  49. M. Ohkoshi, K. Tamari, S. Honda and T. Kusuda, IEEE Trans. Magn. MAG-20 (1984) 788.

    CAS  Google Scholar 

  50. F. Kugiya, M. Suzuki, F. Kanno, Y. Yoshida, O. Kitakami, H. Fujiwara and D. E. Speliotis, ibid. MAG-24 (1988) 2908.

    Google Scholar 

  51. J. Desserre and D. Jeanniot, ibid MAG-19 (1983) 1647.

    CAS  Google Scholar 

  52. P. Bernstein and F. Rio, ibid. MAG-23 (1987) 143.

    CAS  Google Scholar 

  53. T. Mizoguchi, N. Akutsu and M. Akimitsu, J. Appl. Phys. 61 (1987) 3158.

    CAS  Google Scholar 

  54. N. Akutsu, M. Akimitsu and T. Mizoguchi, IEEE Trans. Magn. MAG-22 (1986) 1170.

    CAS  Google Scholar 

  55. A. Morisako, M. Matsumoto and M. Naoe, ibid. MAG-22 (1986) 1146.

    CAS  Google Scholar 

  56. C. W. Chen and C. S. Alford, Lawrence Livermore National Laboratory Report UCID-20601 (1985).

  57. J. W. Smits, S. B. Luitjens, F. J. A. Den Broeder and A. G. Dirks, J. Magn. Magn. Mat. 31–34 (1983) 920.

    Google Scholar 

  58. J. A. Thompson and P. B. Mee, IEEE Trans. Magn. MAG-20 (1984) 785.

    CAS  Google Scholar 

  59. T. M. Coughlin, J. H. Judy and E. R. Wuori, ibid. MAG-17 (1981) 3169.

    CAS  Google Scholar 

  60. T. Wielinga and J. C. Lodder, ibid. MAG-17 (1981) 3178.

    CAS  Google Scholar 

  61. J. C. Lodder, T. Wielinga and J. Worst, Thin Solid Films 101 (1983) 61.

    CAS  Google Scholar 

  62. H. Maeda, J. Appl. Phys. 54 (1983) 2429.

    CAS  Google Scholar 

  63. J. A. Thornton, in “Deposition Technologies for Films and Coating,” edited by R. F. Bunshah (Noyes Publications, New York, 1982).

    Google Scholar 

  64. S. Kadokura, T. Tomie and M. Naoe, IEEE Trans. Magn. MAG-17 (1981) 3175.

    CAS  Google Scholar 

  65. K. Roll, R. Kukla, M. Mayr and W. D. Munz, ibid. MAG-20 (1984) 63.

    Google Scholar 

  66. S.-I. Iwasaki, K. Ouchi, K. Saiki and M. Kimura, ibid. MAG-22 (1986) 1158.

    CAS  Google Scholar 

  67. D. Ravipati, J. M. Sivertsen and J. H. Judy, ibid. MAG-22 (1986) 1152.

    CAS  Google Scholar 

  68. M. Kume, D. Kishimoto, Y. Nakatsuka and Y. Abe, ibid. MAG-22 (1986) 1161.

    CAS  Google Scholar 

  69. M. Mayr, K. Kastner, R. Kukla and R. Ludwig, ibid. MAG-23 (1987) 131.

    Google Scholar 

  70. Y. Niimura, S. Nakagawa and M. Naoe, ibid. MAG-23 (1987) 2043.

    Google Scholar 

  71. T. M. Coughlin, E. R. Wuori and J. H. Judy, J. Vac. Sci. Tech. 20 (1982) 171.

    CAS  Google Scholar 

  72. R. Kukla, J. Kieser and M. Mayr, IEEE Trans. Magn. MAG-23 (1987) 137.

    Google Scholar 

  73. M. Ohkoshi and T. Kusuda, J. Vac. Sci. Tech. A5 (1987) 2859.

    Google Scholar 

  74. Y. Suzuki, K. Takiguchi, M. Yoshitake, T. Yotsuya and S. Ogawa, ibid. A5 (1987) 1870.

    Google Scholar 

  75. J. A. Thompson and D. A. Stevenson, IEEE Trans. Magn. MAG-21 (1985) 1441.

    CAS  Google Scholar 

  76. Y. Nakatsuka, H. Tanaka, T. Kyozumi and Y. Abe, ibid. MAG-22 (1986) 1002.

    CAS  Google Scholar 

  77. N. Honda and H. Uchiyama, ibid. MAG-23 (1987) 3657.

    CAS  Google Scholar 

  78. H. R. Kaufmann, J. Vac. Sci. Tech, 15 (1978) 272.

    Google Scholar 

  79. H. S. Gill and M. P. Rosenblum, IEEE Trans. Magn. MAG-19 (1983) 1044.

    Google Scholar 

  80. W. T. Maloney and C. D. Lustig, ibid. MAG-20 (1984) 521.

    CAS  Google Scholar 

  81. R. D. Fisher, V. S. Au-Yeung and B. B. Sabo, ibid. MAG-20 (1984) 806.

    CAS  Google Scholar 

  82. S. Kadokura and M. Naoe, ibid. MAG-18 (1982) 1113.

    CAS  Google Scholar 

  83. R. Ludwig, K. Kastner, R. Kukla and M. Mayr, in “Digest of International Conf. on Magnetic Recording Media CMD2” (1986).

  84. K. Nakamura, T. Yamada, Y. Ohta and A. Itoh, IEEE Trans. Magn. MAG-18 (1982) 1080.

    Google Scholar 

  85. M. Ohkoshi, R. Ohkata, K. Inoue, S. Honda and T. Kusuda, Jpn. J. Appl. Phys. 19 (1980) 1807.

    CAS  Google Scholar 

  86. E. Krikorian and R. J. Sneed, J. Appl. Phys. 37 (1966) 3674.

    CAS  Google Scholar 

  87. H. Maeda, ibid. 54 (1983) 2429.

    CAS  Google Scholar 

  88. T. Chen, G. B. Charlan and T. Yamashita, ibid. 54 (1983) 5103.

    CAS  Google Scholar 

  89. D. W. Hoffman and J. A. Thornton, J. Vac. Sci. Tech. 17 (1980) 380.

    CAS  Google Scholar 

  90. S. Kim, D. J. Henderson and P. Chandhari, Thin Solid Films 47 (1977) 155.

    CAS  Google Scholar 

  91. A. Feuerstein and M. Mayr, IEEE Trans. Magn. MAG-20 (1984) 51.

    CAS  Google Scholar 

  92. R. Sugita, T. Kunieda and F. Kobayashi, ibid. MAG-17 (1981) 3172.

    CAS  Google Scholar 

  93. R. Sugita and K. Kobayashi, ibid. MAG-18 (1982) 1818.

    CAS  Google Scholar 

  94. R. Sugita, ibid. MAG-20 (1984) 687.

    CAS  Google Scholar 

  95. R. Sugita, T. Nambu and T. Sakamoto, ibid. MAG-23 (1987) 2449.

    CAS  Google Scholar 

  96. K. Honda, H. Sugita and Y. Sakamoto, ibid. MAG-23 (1987) 2040.

    CAS  Google Scholar 

  97. K. Yoshida, K. Imagawa, Y. Honda, M. Futomoto and H. Daimon, Jpn. J. Appl. Phys. 27 (1988) 1240.

    CAS  Google Scholar 

  98. C. F. Brucker, M. M. Romach and W. E. Yetter, IEEE Trans. Magn. MAG-24 (1988) 2359.

    Google Scholar 

  99. S. Honda and J. Storer, ibid. MAG-22 (1986) 337.

    CAS  Google Scholar 

  100. F. A. Pronk and J. C. Lodder, ibid. MAG-24 (1988) 1744.

    Google Scholar 

  101. T. Osaka, N. Kasai, I. Koiwa, F. Goto and Y. Suganuma, J. Electrochem. Soc. 130 (1983) 568.

    CAS  Google Scholar 

  102. T. Osaka, I. Koiwa, M. Toda, T. Sakuma, Y. Yamazaki, T. Namikawa and F. Goto, IEEE Trans. Magn. MAG-22 (1986) 1149.

    CAS  Google Scholar 

  103. I. Koiwa, H. Matsubara, T. Osaka, Y. Yamazaki and T. Namikawa, J. Electrochem. Soc. 133 (1986) 667.

    Google Scholar 

  104. I. Koiwa, Y. Okabe, H. Matsubara, T. Osaka and F. Goto, J. Magn. Soc. Jpn. 58 (1985) 414.

    Google Scholar 

  105. K. Ito, O. Takano and H. Matsuda, in Asst. 66th Conference of the Metal Finish Society, Japan, 1980, p. 8.

  106. T. Chen and P. L. Cavallotti, IEEE Trans. Magn. MAG-18 (1982) 1125.

    CAS  Google Scholar 

  107. H. Hoffmann, L. Kochanowsky, H. Mandl, K. Kastner, M. Mayr, W. D. Munz and K. Roll, ibid. MAG-21 (1985) 1432.

    CAS  Google Scholar 

  108. S. Kawai and R. Ueda, J. Electrochem. Soc. 122 (1975) 32.

    CAS  Google Scholar 

  109. N. Tsuya, T. Tokushima, M. Shiraki, Y. Wakui, T. Saito, H. Nakamura, S. Hayano, A. Furugori and M. Tanaka, IEEE Trans. Magn. MAG-22 (1986) 1140.

    CAS  Google Scholar 

  110. N. Tsuya, T. Tokushima, M. Shiraki, Y. Wakui, Y. Saito, H. Nakamura and Y. Katsumata, ibid. MAG-23 (1987) 53.

    CAS  Google Scholar 

  111. N. Tsuya, T. Tokushima, M. Shiraki and Y. Umehara, ibid. MAG-24 (1988) 1790.

    Google Scholar 

  112. M. Ohkoshi, S. Oda and T. Kusuda, ibid. MAG-23 (1987) 2248.

    CAS  Google Scholar 

  113. C. Allibert, C. Bernard, N. Valignat and M. Dombre, J. Less Common Metals 59 (1978) 211.

    CAS  Google Scholar 

  114. W. G. Moffatt, in “The Handbook of Binary Phase Diagrams,” Vol. 2 (General Electric Co., Schenectady, 1981).

    Google Scholar 

  115. J. W. Smits, S. B. Luitjens and F. J. A. Den Broeder, J. Appl. Phys. 55 (1984) 2260.

    CAS  Google Scholar 

  116. M. Hansen, in “Constitution of Binary Alloys” (McGraw-Hill Book Co., New York, 1958) p. 467.

    Google Scholar 

  117. “Metals Handbook” Vol. 8, 8th Edn edited by T. Lyman (American Society for Metals, Metals Park, 1973) p. 287.

    Google Scholar 

  118. Y. Matsunaga, Kinzoku-No-Kenkyu 8 (1931) 549.

    Google Scholar 

  119. H. Awano and T. Sato, Jpn. J. Appl. Phys. 27 (1988), L880.

    CAS  Google Scholar 

  120. H. Masuya and H. Awano, IEEE Trans. Magn. MAG-23 (1987) 2064.

    CAS  Google Scholar 

  121. R. D. Fisher, V. S. Au-Yeung and B. B. Sabo, ibid. MAG-20 (1984) 806.

    CAS  Google Scholar 

  122. P. J. Grundy and M. Ali, J. Magn. Mater. 40 (1983) 154.

    CAS  Google Scholar 

  123. T. Maro, O. Kitakami, and H. Fujiwara, Jpn. J. Appl. Phys. 27 (1988) L687.

    CAS  Google Scholar 

  124. Y. Maeda and M. Asahi, IEEE Trans. Magn. MAG-23 (1987) 2061.

    CAS  Google Scholar 

  125. Y. Maeda and M. Takahashi, Jpn. J. Appl. Phys. 28 (1989) L-248.

    Google Scholar 

  126. W. Andra and H. Danan, IEEE Trans. Magn. MAG-23 (1987) 62.

    Google Scholar 

  127. J.-W. Lee, B. G. Demczyk, K. R. Mountfield and D. E. Laughlin, ibid. MAG-23 (1987) 2455.

    CAS  Google Scholar 

  128. S. Honda and J. Storer, ibid. MAG-22 (1986) 337.

    CAS  Google Scholar 

  129. T. Kusuda, S. Honda and M. Ohkoshi, J. Appl. Phys. 53 (1982) 2338.

    CAS  Google Scholar 

  130. S. Yasugi, S. Honda, M. Ohkoshi and T. Kasuda, ibid. 52 (1981) 2298.

    CAS  Google Scholar 

  131. J.-W. Lee, B. G. Demczyk, K. R. Mountfield and D. E. Laughlin, ibid. 61 (1987) 3813.

    CAS  Google Scholar 

  132. R. J. Artley, K. Ouchi and S.-I. Iwasaki, IEEE Trans. Magn. MAG-24 (1988) 2335.

    Google Scholar 

  133. D. A. Glocker, W. E. Yetter and J.-S. Gau, ibid. MAG-22 (1986) 331.

    CAS  Google Scholar 

  134. S. Yoichi, H. Kazuyoshi, N. Taro, S. Ryuji and T. Miho, ibid. MAG-23 (1987) 3654.

    Google Scholar 

  135. T. Spalvins and W. A. Brainard, J. Vac. Sci. Tech. 11 (1974) 1186.

    CAS  Google Scholar 

  136. T. Spalvins, Thin Solid Films 64 (1979) 143.

    CAS  Google Scholar 

  137. J. W. Pattern, ibid. 63 (1979) 121.

    Google Scholar 

  138. K. H. Guenther, Appl. Optics 20 (1981) 1034.

    CAS  Google Scholar 

  139. R. Sugita, IEEE Trans. Magn. MAG-20 (1984) 687.

    CAS  Google Scholar 

  140. J. W. Nieuwenthuizen and H. B. Haastra, Philips Tech. Rev. 27 (1966) 87.

    Google Scholar 

  141. A. G. Dirks and H. J. Leamy, Thin Solid Films 47 (1977) 219.

    CAS  Google Scholar 

  142. E. M. Simpson and J. H. Judy, IEEE Trans. Magn. MAG-22 (1986) 1167.

    CAS  Google Scholar 

  143. M. Matsuoka, Y. Hoshino, M. Naoe and S. Yamanaka, in Proceedings of the Conference IECE Japan S15-6 (1983) p. 254.

    Google Scholar 

  144. Y. Tanaka, H. Ito, T. Sonoda and R. Nishikawa, IEEE Trans. Magn. MAG-23 (1987) 2046.

    CAS  Google Scholar 

  145. A. Van Der Drift, Philips Res. Rep. 22 (1967) 267.

    Google Scholar 

  146. Y. Niimura, S. Nakagawa and M. Naoe, IEEE Trans. Magn. MAG-22 (1986) 1164.

    CAS  Google Scholar 

  147. H. S. Gill and M. P. Rosenblum, ibid. MAG-19 (1983) 1644.

    CAS  Google Scholar 

  148. H. S. Gill and T. Yamashita, ibid. MAG-20 (1984) 776.

    CAS  Google Scholar 

  149. T. Tomie, M. Ogusawara, Y. Kato and I. Ouchi, Jpn. J. Appl. Phys. 27 (1988) 1890.

    CAS  Google Scholar 

  150. A. K. Jhingan, R. R. Dubin and L. F. Herte, IEEE Trans. Magn. MAG-20 (1984) 779.

    CAS  Google Scholar 

  151. M. Futamoto, Y. Honda, H. Kakibayashi and K. Yoshida, ibid. MAG-21 (1985) 1426.

    CAS  Google Scholar 

  152. C. P. G. Schrauwen, J. P. C. Bernards, R. W. De Bie, G. J. P. Van Engelen, H. H. Stel, V. Zieren and S. B. Luitjens, ibid. MAG-24 (1988) 1901.

    Google Scholar 

  153. Y. Uesaka, S. Hishiyama and H. Fuziwara, in Proceedings of the 1982 Sendai Symposium, Tokoku University, Japan, 1982.

    Google Scholar 

  154. J. A. Aboaf, J. Electrochem. Soc. 116 (1969) 1736.

    CAS  Google Scholar 

  155. D. W. Hoffman and J. A. Thornton, Thin Solid Films 40 (1977) 355.

    CAS  Google Scholar 

Download references

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  1. Chemistry and Materials Science Department, Lawrence Livermore National Laboratory, University of California, 94550, Livermore, California, USA

    C. W. Chen

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Chen, C.W. Fabrication and characterization of thin films with perpendicular magnetic anisotropy for high-density magnetic recording. J Mater Sci 26, 1705–1728 (1991). https://doi.org/10.1007/BF00543593

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