Abstract
A fine carbon filament has been used as substrate in a microwave plasma enhanced chemical vapour deposition (MPECVD) process. The carbon filaments were severely etched to form carbon dusts which then served as nucleation seeds. Polycrystalline diamond coatings on the carbon dust and the diamond dust, which was used during the sonication pre-treatment, were obtained at temperatures below 1000°C. A mini-explosion that formed a 120-μm diamond sphere occurred at a temperature of 950°C. As the processing temperature further increased, several explosions occurred to form protrusions, including glassy carbon spheres with volumes greater than 22 mm3, and thick glassy carbon coatings, at an average rate as high as 270 μm per 17 h, on the entire surface. These thick coatings occurred on the untreated surface of a Si coupon, which was used to support the carbon filaments. The explosion has been explained to be as a result of energy absorption from the microwave and plasma.
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References
N. Ohtake, H. Takura, Y. Kuriyama, Y. Mashimo and M. Yoshikawa, Proceedings of 1st International Symposium on Diamond and Diamond-Like Films (The Electrochemical Society, 1989).
C. Li, Y.C. Lau, and S.L. Girshick, in Proceedings of 2nd International Symposium on Diamond Materials (The Electrochemical Society, 1991).
M. Kamo, Y. Sato, S. Matsumoto and N. Setaka, J. Cryst. Growth 62 (1983) 642.
R. Meilunas, M.S. Wong, K.C. Sheng and R.P.H. Chang, Appl. Phys. Lett. 54 (1989) 2204.
M. Kamo and Y. Sato, in Proceedings of 2nd International Symposium on Diamond Materials (The Electrochemical Society, 1991).
M. Peters, J.M. Pinneo, L.S. Plano, K.V. Ravi, V. Versteeg and S. Yokota, SPIE Proc. 877 (1988) 79.
S. Matsumoto, Y. Sato, M. Kamo and N. Setaka, Jpn. J. Appl. Phys. 21 (1982) L183.1
W.A. Yarbrough, K. Tankala and T. Debroy, J. Mater. Res. 7 (1992) 379.
Y. Hirose, S. Amanuma, N. Okada and K. Komaki, in Proceedings of 1st International Symposium on Diamond and Diamond Like Films (Electrochemical Society, 1989).
J. Angus, in “Diamond Films '91”, Nice, France, September, 1991 (Elsevier, Switzerland).
T. Suzuki, Z. Li, A. Argoita and P. Pirouz, in Wayne State University Third Annual Diamond Technology Workshop, March, 1992.
J.J. Dubray, C.G. Pantano and W.A. Yarbrough, J. Appl Phys. 72 (1992) 3136.
J.-M. Ting and M.L. Lake, J. Mater. Res. 9 (1994) 636.
Idem., Diamond Rel. Mater. 3 (1994) 1243.
M.L. Lake, J.-M. Ting and J.F. Phillips, Jr., Surface Coat. Technol. 62 (1993) 367.
J.-M. Ting and M.L. Lake, in Proceedings of the International Conference on Processing, Fabrication, and Applications Advanced Composites, Long Beach, CA, 1993 (ASM Internat. Materials Park, OH).
J. Singh and M. Vellaikal, J. Appl. Phys. 73 (1993) 15.
Z. Feng, K. Komvpoulos, I.G. Brown and D.B. Bogy, Ibid. 74 (1993) 2841.
H. Maeda, S. Ikari, T. Okubo, K. Kusakabe and S. Morooka, J. Mater. Sci. 28 (1993) 129.
C.-M Niu, G. Tsagaropoulos, J. Baglio, K. Dwight and A. Wold, J. Solid State Chem. 91 (1991) 47.
N. Sekada, in Proceedings of 10th International Conference on CVD, edited by G.W. Cullen and J. Blocher, Jr (The Electrochemical Society, 1987).
J.-M. Ting, Final Report, NSF Grant No. III-9261081, September, 1993.
P.N. Barnes and R.L.C. Wu, Appl. Phys. Lett. 62 (1993) 4.
A.J. Berteaud and J.C. Badot, J. Microwave Power 11 (1976) 315.
D.L. Johnson, Ceram. Trans. 21 (1991) 17.
T.T. Meek and R.D. Blake, J. Mater. Sci. Lett. 5 (1986) 270.
W.H. Sutton, Ceram. Bull. 68 (1989) 376.
Idem., Proc. Mater. Res. Soc. 124 (1988) 7.
R.E. Newnham, S.J. Jang, M. Xu and F. Jones, Ceram. Trans. 21 (1991) 51.
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Ting, J.M. Diamond deposition on fine vapour grown carbon filament. JOURNAL OF MATERIALS SCIENCE 30, 4049–4058 (1995). https://doi.org/10.1007/BF00360708
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DOI: https://doi.org/10.1007/BF00360708