Skip to main content
SpringerLink
Log in

The effective chemical vapour deposition rate of diamond

  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

The effective chemical vapour deposition (CVD) rate of diamond, defined as the total thickness of diamond or as the mass of diamond deposited per unit time, may be increased by orders of magnitude by increasing the substrate area per unit volume. To obtain these high deposition rates, novel substrate designs are proposed that exploit three-dimensional arrays of small diameter wires or fibres. The analysis suggests that the increased diamond output should be achieved with no increase in the net gas flow or power consumption, which could lead to the more economic production of solid diamond shapes and of composites containing continuous or short diamond fibres, or particulate diamond. Estimates for the cost of CVD diamond made by the fibre array technique are compared with reported current and predicted costs for CVD diamond and estimates for the cost of CVD SiC.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. P. G. Partridge, P. W. May and M. N. R. Ashfold, Mater. Sci. Technol. 10 (1994) 177.

    Article  CAS  Google Scholar 

  2. M. N. R. Ashfold, P. W. May, C. A. Rego and N. M. Everitt, Chem. Soc. Rev. 23 (1994) 21.

    Article  CAS  Google Scholar 

  3. G. Lu, K. J. Gray, E. F. Borchelt, L. K. Bigelow and J. E. Graebner, Diamond Rel. Mater. 2 (1993) 1064.

    Article  CAS  Google Scholar 

  4. E. Sevillano, J. Casey, R. Gat, S. Jin, R. S. Post and D. K. Smith, in “Diamond Films 94”, 5th European Conference On Diamond and Related Materials, Il Ciocco, Italy. September (1994) in press.

  5. D. S. Hoover, ibid.

  6. P. W. May, C. A. Rego, R. M. Thomas, M. N. R. Ashfold, K. N. Rosser, P. G. Partridge and N. M. Everitt, in “Proceedings of the 3rd International Symposium on Diamond Materials”, Electrochemical Society, Honolulu (1993) p. 1036.

    Google Scholar 

  7. A. A. Morrish, J. W. Glesener, P. E. Pehrsson, B. Maruyama and P. M. Natishan, ibid., p. 834.

    Google Scholar 

  8. M. D. Drory, R. J. McClelland, F. W. Zok and F. E. Heredia, J. Am. Ceram. Soc. 76 (1993) 1387.

    Article  CAS  Google Scholar 

  9. A. R. Bunsell, “Fibre reinforcements for composite materials” (Elsevier, 1988).

  10. T. F. Cooke, J. Am. Ceram. Soc. 74 (1991) 2959.

    Article  CAS  Google Scholar 

  11. A. R. Bunsell, Compos. Sci. Technol. 51 (1994) 127.

    Article  CAS  Google Scholar 

  12. P. W. May, C. A. Rego, M. N. R. Ashfold, K. N. Rosser, N. M. Everitt, P. G. Partridge, Q. S. Chia and G. H. Lu, in “Advances in new diamond science and technology” edited by S. Saito, N. Fujimori, O. Fukunaga, M. Kamo, K. Kobash and M. Yoshikama, Tokyo (1994) p. 211.

  13. J. M. Ting, M. L. Lake and D. C. Ingram, Diamond Rel. Mater. 2 (1993) 1069.

    Article  CAS  Google Scholar 

  14. J. M. Ting and M. L. Lake, J. Mater. Res. 9 (1994) 636.

    Article  CAS  Google Scholar 

  15. P. G. Partridge, P. W. May, C. Rego and M. N. R. Ashfold, Mater. Sci. Technol. 10 (1994) 505.

    Article  CAS  Google Scholar 

  16. C.-M. Niu, G. Tsagaropoulas, J. Baglio, K. Durght and A. Wold, J. Solid State Chem. 91 (1991) 47.

    Article  CAS  Google Scholar 

  17. V. P. Godbole and Narayan, J. Mater. Res. 7 (1992) 2785.

    Article  CAS  Google Scholar 

  18. Q. S. Chia, C. M. Younis, P. G. Partridge, G. C. Allen, P. W. May and C. A. Rego, J. Mater. Sci. 29 (1994) 6397.

    Article  CAS  Google Scholar 

  19. A. Mortensen and I. Jin, Int. Mater. Rev. 37 (1992) 101.

    Article  CAS  Google Scholar 

  20. Z. Zhang, S. Long and H. M. Flower, Compos. 25 (1994) 380.

    Article  CAS  Google Scholar 

  21. G. H. Lu, P. G. Partridge and P. W. May, J. Mater. Sci. Lett. (1995) in press.

  22. T. Obata and S. Morimoto, SPIE 1146 (1989) 208.

    CAS  Google Scholar 

  23. J. V. Busch and J. P. Dismukes, Diamond Rel. Mater. 3 (1994) 295.

    Article  Google Scholar 

  24. P. G. Partridge, G. H. Lu, J. W. Steeds and P. W. May, Diamond Rel. Mater. (1995) 848.

  25. C.-P. Klages, M. Sattler and L. Schafer, in “Proceedings of the 3rd International Symposium on Diamond Materials”, Proceedings of the Electrochemical Society 93–17 (1993) pp. 24–33.

  26. P. G. Partridge and C. M. WardClose, Int. Mater. Rev. 38 (1993) 1.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Interface Analysis Centre, University of Bristol, BS8 1TS, Bristol, UK

    P. G. Partridge

  2. School of Chemistry, University of Bristol, BS8 1TS, Bristol, UK

    P. G. Partridge, M. N. R. Ashfold, P. W. May & E. D. Nicholson

Authors
  1. P. G. Partridge
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. N. R. Ashfold
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. P. W. May
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. E. D. Nicholson
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Partridge, P.G., Ashfold, M.N.R., May, P.W. et al. The effective chemical vapour deposition rate of diamond. JOURNAL OF MATERIALS SCIENCE 30, 3973–3982 (1995). https://doi.org/10.1007/BF00360696

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00360696

Keywords

Search

Navigation