Skip to main content
SpringerLink
Log in

The dependence of diamond growth rate on hydrogen dissociation in a d.c. arcjet plasma

  • Papers
  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

A calorimetric technique was used to measure the plasma enthalpy in a d.c. arcjet diamond deposition system. Using these measurements, and a model based on the assumption of local thermal equilibrium (LTE), the temperature of the plasma emerging from the torch nozzle could be calculated. By controlling the electrical power into the torch, the plasma temperature could be varied from 2900 to 4500 K. This range of plasma temperatures corresponded to a fraction of dissociated H2 (α) which ranged from 0.19 to 0.98. Surprisingly, this variation in the concentration of atomic hydrogen had no effect on the diamond growth rate.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. J. C. Angus, H. A. Will and W. S. Stanko, J. Appl. Phys. 39 (1968) 2915.

    Article  CAS  Google Scholar 

  2. D. J. Poferl, N. C. Gardner and J. C. Angus, J. Appl. Phys. 44 (1973) 1428.

    Article  CAS  Google Scholar 

  3. R. Messier, A. R. Badzian, T. Badzian, K. E. Spear, P. Bachmann and R. Roy, Thin Solid Films 153 (1987) 1.

    Article  CAS  Google Scholar 

  4. D. V. Fedoseev, V. P. Varnin and B. V. Deryagin, Russ. Chem. Rev. 53 (1984) 435.

    Article  Google Scholar 

  5. B. V. Spitsyn and L. L. Bouilov, in “Extended abstracts, diamond and diamondlike materials synthesis”, edited by G. H. Johnson, A. R. Badzian and M. W. Geis (Materials Research Society, Pittsburgh, PA, 1988), p. 3.

    Google Scholar 

  6. B. V. Spitsyn, L. L. Bouilov and B. V. Derjaguin, J. Cryst. Growth 52 (1981) 219.

    Article  CAS  Google Scholar 

  7. S. J. Harris, Appl. Phys. Lett. 56 (1990) 2298.

    Article  CAS  Google Scholar 

  8. M. Frenklach and K. E. Spear, J. Mater. Res. 3 (1988) 133.

    Article  CAS  Google Scholar 

  9. M. Frenklach and H. Wang, Phys. Rev. B 43 (1991) 1520.

    Article  CAS  Google Scholar 

  10. D. G. Goodwin, Appl. Phys. Lett. 59 (1991) 277.

    Article  CAS  Google Scholar 

  11. P. Deák, J. Giber and H. Oechsner, Surface Sci. 250 (1991) 287.

    Article  Google Scholar 

  12. D. G. Goodwin and G. G. Gavillet, J. Appl Phys. 68 (1990) 6393.

    Article  CAS  Google Scholar 

  13. D. G. Goodwin, J. Appl. Phys. 74 (1993) 6888.

    Article  CAS  Google Scholar 

  14. M. Frenklach, J. Appl. Phys. 65 (1989) 5142.

    Article  CAS  Google Scholar 

  15. J. Harris and A. M. Weiner, J. Appl. Phys. 67 (1990) 6520.

    Article  CAS  Google Scholar 

  16. F. G. Celii and J. E. Butler, Appl. Phys. Lett. 54 (1989) 1031.

    Article  CAS  Google Scholar 

  17. L. Schäfer and C. P. Klages, Appl. Phys. Lett. 58 (1991) 571.

    Article  Google Scholar 

  18. J. A. Mucha, D. L. Flamm and D. E. Ibbotson, J. Appl. Phys. 65 (1989) 3448.

    Article  CAS  Google Scholar 

  19. B. L. Preppernau and T. A. Miller, J. Vac. Sci. Technol. A 8 (1990) 1673.

    Article  CAS  Google Scholar 

  20. E. Pfender, M. Boulos and P. Fauchis, in “Plasma technology in metallurgical processing” (Iron and Steel Society, Inc., Warrendale, PA, 1987).

    Google Scholar 

  21. V. Dembovsky, “Plasma metallurgy: the principles” (Elsevier, New York, NY, 1985).

    Google Scholar 

  22. L. D. Landau and E. M. Lifshitz, “Fluid mechanics” (Pergamon Press, Elmsford, NY, 1987).

    Google Scholar 

  23. L. D. Landau and E. M. Lifshitz, “Statistical physics” (Pergamon Press, Elmsford, NY, 1980).

    Google Scholar 

  24. D. A. Russell and P. Taborek, in “Diamond optics IV, Proc. SPIE 1534”, edited by Albert Feldman and Sandor Holly (SPIE, Bellingham, WA, 1991) p. 14.

    Google Scholar 

  25. Y. F. Zhang, D. Dunn-Rankin and P. Taborek, J. Appl Phys. 74 (1993) 6941.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Physics, University of California, Irvine, 92717, Irvine, CA, USA

    D. A. Russell & P. Taborek

Authors
  1. D. A. Russell
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. P. Taborek
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Russell, D.A., Taborek, P. The dependence of diamond growth rate on hydrogen dissociation in a d.c. arcjet plasma. Journal of Materials Science 29, 4683–4685 (1994). https://doi.org/10.1007/BF00356509

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00356509

Keywords

Search

Navigation