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Thermally robust thin-metal membrane capacitive RF MEMS switch

  • Sudhanshu ShekharEmail author
  • K. J. Vinoy
Original Article
  • 6 Downloads

Abstract

Temperature plays a critical role in the reliability of radio-frequency micro-electro-mechanical systems (RF MEMS) switches. The focus of this paper to realize temperature-stable capacitive-type RF MEMS switch. We report design, FEA-based modeling and thermal characterization at different ambient temperature. Experimental result suggests that presented switch topology is temperature stable and stress tolerant. Measurement up to \(100\,^{\circ }{\text {C}}\) shows variation of \(0.03 \,{\text {V}}/^{\circ }{\text {C}}\) in the pull-in and pull-up voltages. In addition, RF and the dynamic response of these switches are also measured and presented. These MEMS switches need 6.5 V for actuation. The mechanical resonant frequency and quality factor are measured to be 10.7 kHz and 1.16, respectively. The measured switching and release times are \(36\,\upmu {\text {s}}\) and \(20\,\upmu {\text {s}}\), respectively. The experimental results suggest that the presented MEMS switch is a suitable choice for RF applications at elevated temperature.

Keywords

Capacitive switch MEMS switch Pull-in RF MEMS Reliability Residual-stress Temperature 

Notes

Acknowledgements

The authors like to thank Prof. G. K. Ananthasuresh, Department of Mechanical Engineering, Indian Institute of Science (IISc), Bengaluru, for his supervision and facility technologists of Nantional Nanofabrication Centre (NNFC) and Micro Nano Characterization Facility (MNCF) at Centre for Nano Science and Engineering (CeNSE), IISc for their support in microfabrication and characterization.

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Copyright information

© Institute of Smart Structures & Systems, Department of Aerospace Engineering, Indian Institute of Science, Bangalore 2019

Authors and Affiliations

  1. 1.Electrical Communication Engineering Mechanical EngineeringIndian Institute of ScienceBangaloreIndia
  2. 2.Electrical Communication EngineeringIndian Institute of ScienceBangaloreIndia

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