High-accuracy tracking of piezoelectric positioning stage by using iterative learning controller plus PI control
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Piezoelectric positioning stages as control system actuator are widely used in equipment drive. In this paper, according to the physical mechanism of the piezoelectric positioning stage control system, an approximate time-domain mathematical model is established for the selection of piezoelectric positioning stage control system. The least-squares method is used to identify the parameters of the model. The outputs of the pulse width signal of the obtained model are consistent with that of the actual system. Then, iterative learning controller plus proportional integral control based on frequency domain tools is designed according to the form of the model, the stability of the control approach and the selection of its parameters are discussed in detail. The experimental results demonstrate the successful implementation with good performance on the piezoelectric positioning stage.
KeywordsPiezoelectric positioning stage System modeling Iterative learning control PI control
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