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Fabrication and characterization of PSi/nanometal hybrid structures by laser for CO gas sensor


Mesoporous silicon (mesoPSi) layers fabricated by the photoelectrochemical etching (PECE) method in hydrofluoric acid (HF) are active as carbon monoxide gas sensors. The modified porous silicon (PSi) can be used with noble metals to manufacture an effective gas sensor. Embedded gold, platinum, and palladium nanoparticles Au, Pt, and Pd-NPs could modify the surface morphology of mesoPSi and form mesoPSi/AuPtPd-NPs hybrid structures through a simple and dipping process in fixed salt concentrations. The morphology of the hybrid structures has been studied using scanning electron microscopy and X-ray diffraction. The prepared gas sensor has measured the electrical characteristics at room temperature. Shape, nanoparticle size, and specific surface area strongly influenced the current–voltage characteristics. The results show that Au, Pd, and Pt-NPs sizes prepared by the dipping process for mesopore-like structures were in the range from 0.64 to 7.53 nm. Besides, considerable improvements in the response, recovery times and sensitivity of gas sensor were noticed when decreasing the incorporated Au, Pd, and Pt-NPs to the mesoPSi matrix.

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  1. 1.

    Gabouze, N., et al.: CO2 and H2 detection with a CHx/porous silicon-based sensor. Vacuum 80, 986–989 (2006)

  2. 2.

    He, G., Narushima, T., Iguchi, Y., Goto, T., Hirai, T.: 11th International Conference on Solid-State Ionic, Waikiki Beach, Honolulu, Hawaii (1997)

  3. 3.

    Alwan, A.M., Dheyab, A.B.: “Room temperature CO2 gas sensors of AuNPs/mesoPSi hybrid structures. Appl. Nanosci. 7, 335–341 (2017)

  4. 4.

    Alwan, A.M., et al.: Well controlling of plasmonic features of gold nanoparticles on macro porous silicon substrate by HF acid concentration. Plasmonics 13, 2037–2045 (2018)

  5. 5.

    Naama, et al.: CO2 gas sensor based on silicon nanowires modified with metal nanoparticles. Mater. Sci. Semicond. Process. 38, 367–372 (2015)

  6. 6.

    Itoh, T., et al.: Nonanal gas sensing properties of platinum, palladium, and gold-loaded tin oxide VOCs sensors. Sensors Actuators B: Chem. 187, 135–141 (2013)

  7. 7.

    Sari, W., et al.: Oxygen sensors based on screen printed platinum and palladium doped indium oxides. In: Proceedings 1 (2017)

  8. 8.

    Li, X., et al.: Catalytically activated palladium@platinum nanowires for accelerated hydrogen GasVV detection. ACS Nano 9, 3215–3225 (2015)

  9. 9.

    Alwan, A.M., et al.: Study the characteristic of planer and sandwich PSi gas sensor (comparative study). Silicon 10, 2527–2534 (2018)

  10. 10.

    Alwan, A., et al.: Morphological and electrical properties of gold nanoparticles/macroporous silicon for CO2 gas. Iraqi J. Sci. 59, 57–66 (2018)

  11. 11.

    Henisch, H.K.: Metal-semiconductor Schottky barrier junctions and their applications. Proc. IEEE 74, 894 (1986)

  12. 12.

    Baba Ahmed, L., et al.: H2 sensing properties of modified silicon nanowires. Prog. Nat. Sci.: Mater. Int. 25, 101–110 (2015)

  13. 13.

    Sadr, S., et al.: Effect of gold electrode annealing on gas sensing properties of nano- and microstructures of macroporous silicon. Indian J. Pure Appl. Phys. 51, 860–863 (2013)

  14. 14.

    Alwan, A., et al.: Study of the influence of incorporation of gold nanoparticles on the modified porous silicon sensor for petroleum gas detection. Eng. Technol. J. 35(8), 811–815 (2018)

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Correspondence to Safaa Idan Mohammed.

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Dheyab, A.B., Mohammed, S.I., Mustafa, M.K. et al. Fabrication and characterization of PSi/nanometal hybrid structures by laser for CO gas sensor. J Theor Appl Phys (2020).

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  • MesoPSi
  • SEM
  • Gas sensing
  • Photoelectrochemical
  • AuPtPd-NPs hybrid structures