Buckling tip-based nanoscratching with in situ direct measurement of shear dynamics
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We have demonstrated a nanoscratching technique using in situ direct measurement of the elastic and viscous responses of shear dynamics for a buckled quartz nanorod tip. The buckled tip resolves the issue of direct contact of the tip apex providing reliable and repeated usage of scratching. The linewidth of nanoscratched patterns on the Au coated glass substrate is controlled as 100, 200, 250 nm (straight line) and 600, 800 nm (discrete line) by changing the pushing depth at 100, 200, 300 nm and 500, 700 nm, respectively, without any noticeable wear, while the effective elasticity, viscosity, elastic and viscous force, and energy dissipation are simultaneously measured. In particular, we have investigated the dependences of relative humidity and scratch speed, which demonstrates as a nanomechanical convergence platform for nanofabrication.
KeywordsNanoscratching Nanorod/QTF-AFM Elastic force Viscous force
This work was supported by a National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIP) (2016R1A3B1908660) and the Basic Science Research Program through the NRF funded by the Ministry of Education, Science, and Technology (2017R1A6A3A11033301).
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