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Effect of Atmospheric Ageing on the Properties of Organosilicon (Pp-HMDSO) Thin Films

  • S. SaloumEmail author
  • S. A. Shaker
  • R. Hussin
  • A. Obaid
  • M. N. Alkafri
Original Paper


This study reports the effect of ageing on plasma polymerized hexamethyldisiloxane (pp-HMDSO) thin films properties during 90 days storage in the atmosphere. The monitoring of the change in thin film chemical structure by FTIR analysis indicates that the general trend in the thin film ageing process is the enhancement of its inorganic chemical nature. A thickness decrease of 35% of the thin film is observed after 90 days ageing time. Thin film ageing has induced surface morphology degradation though the enhancement of both roughness and porosity. The resulted structural and morphological changes have affected different thin film properties, such as electrical resistivity, optical band gap, optical reflectance, and micro-hardness.


Plasma polymerization Hexamethyldisiloxane (HMDSO) Ageing FTIR AFM 


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The authors would like to thank the Director General of AECS Prof. I Othman, for encouragement and permanent support.


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Copyright information

© Springer Nature B.V. 2019

Authors and Affiliations

  • S. Saloum
    • 1
    Email author
  • S. A. Shaker
    • 1
  • R. Hussin
    • 1
  • A. Obaid
    • 1
  • M. N. Alkafri
    • 1
  1. 1.Physics DepartmentAtomic Energy CommissionDamascusSyria

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