Simultaneous 3-D Surface Profiling of Multiple Targets by Repetition Rate Scanning of a Single Femtosecond Laser
- 42 Downloads
We present an integrated scheme of 3-D surface profile measurements made at multiple sites concurrently by employing only a single fiber femtosecond laser as the common light source of low coherence scanning interferometry. This versatile use of an ultrashort mode-locked laser is enabled by linear scanning control of the pulse repetition rate on the source site, while diverse forms of unequal-path, non-symmetric measurements are taken with nanometer precision for different targets simply by delivering fr-scanned pulses through a fiber network. This proposed scheme has no restriction on the number of interferometer sites being integrated concurrently, allowing more diverse industrial applications of ultrashort lasers despite increased system cost and complexity.
KeywordsSurface profiling Multiple targets Low coherence scanning interferometry Femtosecond laser Repetition rate scanning
This research is supported by Programme of Introducing Talents of Discipline to Universities of China (B12019), National Research Foundation (NRF) of the Republic of Korea (NRF-2012R1A3A1050386) and National Natural Science Foundation of China (No. 51927811 and 51975179).
- 2.Lupo, D., Clemens, W., Breitung, S., Hecker, K. (2013). OE-A roadmap for organic and printed electronics. In E. Cantatore (Ed.), Applications of organic and printed electronics (pp. 1–26). New York: Springer.Google Scholar
- 4.Leach, R., Evans, C., He, L., Davies, A., Duparré, A., Henning, A., et al. (2015). Open questions in surface topography measurement: A roadmap. Surface Topography: Metrology and Properties, 3(1), 013001.Google Scholar
- 7.Harding, K. (2013). Handbook of optical dimensional metrology. Boca Raton: CRC Press.Google Scholar
- 11.Joo, W. D., Park, J., Kim, S., Kim, S., Kim, Y., Kim, S. W., et al. (2013). Phase shifting interferometry for large-sized surface measurements by sweeping the repetition rate of femtosecond light pulses. International Journal of Precision Engineering and Manufacturing, 14(2), 241–246.CrossRefGoogle Scholar