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Simultaneous 3-D Surface Profiling of Multiple Targets by Repetition Rate Scanning of a Single Femtosecond Laser

  • Yang Lu
  • Jiyong Park
  • Dian Bian
  • Liandong YuEmail author
  • Seung-Woo KimEmail author
Regular Paper
  • 42 Downloads

Abstract

We present an integrated scheme of 3-D surface profile measurements made at multiple sites concurrently by employing only a single fiber femtosecond laser as the common light source of low coherence scanning interferometry. This versatile use of an ultrashort mode-locked laser is enabled by linear scanning control of the pulse repetition rate on the source site, while diverse forms of unequal-path, non-symmetric measurements are taken with nanometer precision for different targets simply by delivering fr-scanned pulses through a fiber network. This proposed scheme has no restriction on the number of interferometer sites being integrated concurrently, allowing more diverse industrial applications of ultrashort lasers despite increased system cost and complexity.

Keywords

Surface profiling Multiple targets Low coherence scanning interferometry Femtosecond laser Repetition rate scanning 

Notes

Acknowledgements

This research is supported by Programme of Introducing Talents of Discipline to Universities of China (B12019), National Research Foundation (NRF) of the Republic of Korea (NRF-2012R1A3A1050386) and National Natural Science Foundation of China (No. 51927811 and 51975179).

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Copyright information

© Korean Society for Precision Engineering 2019

Authors and Affiliations

  1. 1.School of Instrument Science and Opto-electronics EngineeringHefei University of Technology (HFUT)HefeiChina
  2. 2.Korea Institute of Industrial Technology (KITECH)SiheungRepublic of Korea
  3. 3.Department of Mechanical EngineeringKorea Advanced Institute of Science and Technology (KAIST)DaejeonRepublic of Korea

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