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LASIE: Large Area Spectroscopic Imaging Ellipsometry for Characterizing Multi-Layered Film Structures

  • Dae Hee Kim
  • Young Ho Yun
  • Ki-Nam Joo
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Abstract

In this investigation, we describe a spectroscopic imaging ellipsometry for large area measurements, named as large area spectroscopic ellipsometry (LASIE). LASIE uses a broadband light source and an imaging spectrometer in order to obtain the spectral-spatial intensity images corresponding to a measurement line of a specimen and it can characterize the 3D multi-film structures with the aid of lateral scanning. Opposed to the typical high resolution imaging ellipsometry with the small field of view (FOV), LASIE uses a low magnification imaging lens to enlarge the measurement area and line profiles of multi-layered film structure can be reconstructed at a single operation based on the operation of the spectroscopic imaging spectrometer. In the experiment, 3- and 4-layered film specimen were measured after the system calibration and the 3D film thickness profiles of all film layers were obtained with 1 nm repeatability.

Keywords

Spectroscopic ellipsometry Large area measurements Film thickness measurement 3D profile measurement Multi-layered film structure 

NOMENCLATURE

ρ

the ratio between Fresnel reflection coefficients of p- and s-waves

r

the Fresnel reflection coefficient

δ

the phase retardation by film layer

\(\tilde S\)

Jones matrix of a specimen

Ã

Jones matrix of an analyzer

\(\tilde P\)

Jones matrix of a polarizer

x

spatial line coordinate

λ

wavelength of an optical source

θ

rotation angle of a compensator

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Copyright information

© Korean Society for Precision Engineering and Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Department of Photonic EngineeringChosun UniversityGwangjuRepublic of Korea

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