This study investigated indium tin oxide (ITO) films that were deposited on fluororesin-46 (F46) and polyimide (PI) transparent flexible substrates by a DC magnetron sputtering system. The optical properties of ITO films on F46 and PI including transmittance and reflectance in visible, near-infrared, and infrared spectral regions were obtained, and the surface morphology, and optical and electrical properties of ITO/F46 and ITO/PI after vacuum ultraviolet irradiation were investigated. The results showed that the mean transmittances of ITO/F46 and ITO/PI decreased and the sheet resistance increased after the irradiation, and these effects were mainly attributed to the greater surface roughness and crystal defects caused by the irradiation.
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This work was supported by the Science and Technology on Vacuum Technology and Physics Laboratory under the research Project No. 6142207040104.
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