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Wuhan University Journal of Natural Sciences

, Volume 24, Issue 5, pp 405–408 | Cite as

Effects of Hot Wire Temperature on Properties of GeSi:H Films with High Hydrogen Dilution by Hot-Wire Chemical Vapor Deposition

  • Xin Tai
  • Xingbing Li
  • Huang Zhen
  • Honglie Shen
  • Yufang Li
  • Haibin HuangEmail author
Chemistry and Physics
  • 1 Downloads

Abstract

GeSi:H films are prepared by hot-wire chemical vapor deposition (CVD) with high hydrogen dilution, DH=98%. Effects of hot wire temperature (Tw) on deposition rate, structural properties and bandgap of GeSi:H films are studied with surface profilemeter, Raman spectroscopy, Fourier transformed infrared spectroscopy, and UV-VIS-NIR spectrophotometer. It is found that the deposition rate (Rd) goes up with increasing of Tw, but increasing rate of Rd declines when Tw⩾1 550 °C. High Tw is beneficial to the formation of Ge-Si, but it has little effect on relative contents of the hydrogen bonds (Ge-H, Si-H, etc.) in the films. In the Tw range of 1 400–1 850 °C, the maximum bandgap of the GeSi:H films is 1.39 eV at Tw =1 450 °C and the band gap decreases with Tw increasing when Tw⩾1 450 °C.

Key words

GeSi:H films hot-wire chemical vapor deposition (CVD) deposition rate structural properties band gap hot wire temperature 

CLC number

O 484.1 

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Copyright information

© Wuhan University and Springer-Verlag GmbH Germany 2019

Authors and Affiliations

  • Xin Tai
    • 1
  • Xingbing Li
    • 2
  • Huang Zhen
    • 2
  • Honglie Shen
    • 3
  • Yufang Li
    • 3
  • Haibin Huang
    • 1
    Email author
  1. 1.Institute of PhotovoltaicsNanchang UniversityNanchang, JiangxiChina
  2. 2.China Intellectual Electric Power Technology (Taixing) Co. Ltd.Taixing, JiangsuChina
  3. 3.Jiangsu Key Laboratory of Materials and Technology for Energy ConversionNanjing, JiangsuChina

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